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@inproceedings{489745, author = {Dvořák, Pavel and Zajíčková, Lenka and Janča, Jan}, address = {Greifswald}, booktitle = {Proceedings of 26th ICPIG}, keywords = {rf capacitive discharges; mode transition; hydrogen}, language = {eng}, location = {Greifswald}, pages = {1-2}, publisher = {Greifswald}, title = {Mode transition in r.f. capacitive discharge in hydrogen}, year = {2003} }
TY - JOUR ID - 489745 AU - Dvořák, Pavel - Zajíčková, Lenka - Janča, Jan PY - 2003 TI - Mode transition in r.f. capacitive discharge in hydrogen PB - Greifswald CY - Greifswald KW - rf capacitive discharges KW - mode transition KW - hydrogen N2 - We have studied low-pressure capacitively coupled rf discharges in hydrogen. Two different discharge modes were observed. These two modes differ significantly in the plasma potential and in the nature of sheaths. For diagnostic purposes the Plasma Process Monitor, optical emission spectroscopy and Lamgmuir probe were used. ER -
DVOŘÁK, Pavel, Lenka ZAJÍČKOVÁ a Jan JANČA. Mode transition in r.f. capacitive discharge in hydrogen. In \textit{Proceedings of 26th ICPIG}. Greifswald: Greifswald, 2003, s.~1-2.
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