D 2003

Plasma potential in low-pressure capacitive r.f. discharges

DVOŘÁK, Pavel, Lenka ZAJÍČKOVÁ and Jan JANČA

Basic information

Original name

Plasma potential in low-pressure capacitive r.f. discharges

Authors

DVOŘÁK, Pavel (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic)

Edition

Praha, WDS'03 Proceedings of contributed papers, part 2, p. 472-476, 5 pp. 2003

Publisher

Matfyzpress

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14330/03:00009330

Organization unit

Faculty of Informatics

ISBN

80-86732-18-5

Keywords in English

plasma potential; hydrogen; Langmuir probe
Změněno: 29/5/2004 18:38, RNDr. JUDr. Vladimír Šmíd, CSc.

Abstract

V originále

We observed two different discharge modes in hydrogen. The modes differed significantly in a visual appearance, plasma potential and in the shape of electron energy distribution function. In order to explain it we established a simple model anabling an aproximate calculation of the plasma potential. This model is not capable to predict real values of the plasma potential but it can qualitatively explain the observed effect.

Links

MSM 143100003, plan (intention)
Name: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates