2003
Plasma potential in low-pressure capacitive r.f. discharges
DVOŘÁK, Pavel; Lenka ZAJÍČKOVÁ and Jan JANČABasic information
Original name
Plasma potential in low-pressure capacitive r.f. discharges
Authors
DVOŘÁK, Pavel (203 Czech Republic, guarantor); Lenka ZAJÍČKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic)
Edition
Praha, WDS'03 Proceedings of contributed papers, part 2, p. 472-476, 5 pp. 2003
Publisher
Matfyzpress
Other information
Language
English
Type of outcome
Proceedings paper
Field of Study
10305 Fluids and plasma physics
Country of publisher
Czech Republic
Confidentiality degree
is not subject to a state or trade secret
RIV identification code
RIV/00216224:14330/03:00009330
Organization unit
Faculty of Informatics
ISBN
80-86732-18-5
Keywords in English
plasma potential; hydrogen; Langmuir probe
Changed: 29/5/2004 18:38, RNDr. JUDr. Vladimír Šmíd, CSc.
Abstract
In the original language
We observed two different discharge modes in hydrogen. The modes differed significantly in a visual appearance, plasma potential and in the shape of electron energy distribution function. In order to explain it we established a simple model anabling an aproximate calculation of the plasma potential. This model is not capable to predict real values of the plasma potential but it can qualitatively explain the observed effect.
Links
| MSM 143100003, plan (intention) |
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