Optical characterization of ZnSe thin films

D 2003

Optical characterization of ZnSe thin films

FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Alberto MONTAIGNE-RAMIL, Alberta BONANNI et. al.

Základní údaje

Originální název

Optical characterization of ZnSe thin films

Autoři

FRANTA, Daniel (203 Česká republika, garant), Ivan OHLÍDAL (203 Česká republika), Petr KLAPETEK (203 Česká republika), Alberto MONTAIGNE-RAMIL (192 Kuba), Alberta BONANNI (380 Itálie), David STIFTER (40 Rakousko) a Helmut SITTER (40 Rakousko)

Vydání

Bellingham, Washington, USA, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, od s. 831-832, 2 s. 2003

Nakladatel

SPIE - The International Society for Optical Engineering

Další údaje

Jazyk

angličtina

Typ výsledku

Stať ve sborníku

Obor

10302 Condensed matter physics

Stát vydavatele

Spojené státy

Utajení

není předmětem státního či obchodního tajemství

Odkazy

URL

Kód RIV

RIV/00216224:14310/03:00009333

Organizační jednotka

Přírodovědecká fakulta

ISBN

0-8194-4596-7

UT WoS

000188036900390

Klíčová slova anglicky

ZnSe; Optical constants; Ellipsometry

Štítky

ellipsometry, optical constants, ZnSe

Změněno: 2. 2. 2005 19:59, Mgr. Daniel Franta, Ph.D.

Anotace

V originále

In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses.

Návaznosti

MSM 143100003, záměr

Název: Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Studium plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Citovat

FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Alberto MONTAIGNE-RAMIL, Alberta BONANNI, David STIFTER a Helmut SITTER. Optical characterization of ZnSe thin films. In 19th Congress of the International Commission for Optics: Optics for the Quality of Life. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 2003, s. 831-832. ISBN 0-8194-4596-7.

@inproceedings{491338,
   author = {Franta, Daniel and Ohlídal, Ivan and Klapetek, Petr and MontaigneandRamil, Alberto and Bonanni, Alberta and Stifter, David and Sitter, Helmut},
   address = {Bellingham, Washington, USA},
   booktitle = {19th Congress of the International Commission for Optics: Optics for the Quality of Life},
   keywords = {ZnSe; Optical constants; Ellipsometry},
   language = {eng},
   location = {Bellingham, Washington, USA},
   isbn = {0-8194-4596-7},
   pages = {831-832},
   publisher = {SPIE - The International Society for Optical Engineering},
   title = {Optical characterization of ZnSe thin films},
   url = {http://hydra.physics.muni.cz/~franta/bib/SPIE4829_831.html},
   year = {2003}
}

TY  - JOUR
ID  - 491338
AU  - Franta, Daniel - Ohlídal, Ivan - Klapetek, Petr - Montaigne-Ramil, Alberto - Bonanni, Alberta - Stifter, David - Sitter, Helmut
PY  - 2003
TI  - Optical characterization of ZnSe thin films
PB  - SPIE - The International Society for Optical Engineering
CY  - Bellingham, Washington, USA
SN  - 0819445967
KW  - ZnSe
KW  - Optical constants
KW  - Ellipsometry
UR  - http://hydra.physics.muni.cz/~franta/bib/SPIE4829_831.html
N2  - In this paper the optical method based on multisample modification variable angle spectroscopic ellipsometry (VASE) is used to characterize thin films of ZnSe prepared by molecular beam epitaxy onto GaAs single crystal substrates. It is found that this method can be employed for determining the spectral dependences of the optical constants and values of the thicknesses of the films mentioned. Moreover, it is shown that using this method the RMS values of the heights and the values of the correlation length characterizing roughness irregularities of the upper boundaries of the films can be determined as well. The application of the method is illustrated by means of characterizing six samples of the ZnSe-films exhibiting different values of the thicknesses.
ER  -

FRANTA, Daniel, Ivan OHLÍDAL, Petr KLAPETEK, Alberto MONTAIGNE-RAMIL, Alberta BONANNI, David STIFTER a Helmut SITTER. Optical characterization of ZnSe thin films. In \textit{19th Congress of the International Commission for Optics: Optics for the Quality of Life}. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 2003, s.~831-832. ISBN~0-8194-4596-7.

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