BIBINOV, Nikita, Vít KUDRLE, Lenka ZAJÍČKOVÁ, Zoltan DONKO a Klaus WIESEMANN. Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons. In Proceedings of ISPC 14. Taormina: Universita di Bari, 2003, s. 806-809. |
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@inproceedings{492209, author = {Bibinov, Nikita and Kudrle, Vít and Zajíčková, Lenka and Donko, Zoltan and Wiesemann, Klaus}, address = {Taormina}, booktitle = {Proceedings of ISPC 14}, keywords = {PECVD; negative ions; acethylene}, language = {eng}, location = {Taormina}, pages = {806-809}, publisher = {Universita di Bari}, title = {Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons}, year = {2003} }
TY - JOUR ID - 492209 AU - Bibinov, Nikita - Kudrle, Vít - Zajíčková, Lenka - Donko, Zoltan - Wiesemann, Klaus PY - 2003 TI - Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons PB - Universita di Bari CY - Taormina KW - PECVD KW - negative ions KW - acethylene N2 - Film deposition in Paralle Plate RF Discharges Containing Hydrocarbons ER -
BIBINOV, Nikita, Vít KUDRLE, Lenka ZAJÍČKOVÁ, Zoltan DONKO a Klaus WIESEMANN. Film deposition in Parallel Plate RF Discharges Containing Hydrocarbons. In \textit{Proceedings of ISPC 14}. Taormina: Universita di Bari, 2003, s.~806-809.
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