Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry

OHLÍDAL, Ivan, Miloslav OHLÍDAL, Petr KLAPETEK, Vladimír ČUDEK and Miloš JÁKL. Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry. Proceedings of SPIE. Bellingham: SPIE, 2003, vol. 5182, No 2, p. 260-271, 11 pp. ISSN 0277-786X.

Basic information

• Original name: Characterization of thin films non-uniform in optical parameters by spectroscopic digital reflectometry
• Authors: OHLÍDAL, Ivan (203 Czech Republic, guarantor), Miloslav OHLÍDAL (203 Czech Republic), Petr KLAPETEK (203 Czech Republic), Vladimír ČUDEK (203 Czech Republic) and Miloš JÁKL (203 Czech Republic).
• Edition: Proceedings of SPIE, Bellingham, SPIE, 2003, 0277-786X.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10306 Optics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• RIV identification code: RIV/00216224:14310/03:00008532
• Organization unit: Faculty of Science
• UT WoS: 000189405800028
• Keywords in English: fims nonuniform in optical parameters; optical characterization
• Tags: optical characterization

Abstract

In this paper, a new optical method for characterizing nonuniform thin films is employed. For applying this method the special experimental arrangement containing CCD camera as a detector is used. Using this experimental arrangement the spectral dependences of the local reflectances are obtained. After treating these experimental data the distributions of the values of the local thicknesses and local refractive index along a large areas of the substrates of the nonuniform films are found. Moreover, it is shown that this method can be used to determine strong nonuniformities in both the optical parameters.

Links

• GA101/01/1104, research and development project: Name: Realizace laboratorního vzoru zařízení pro měření drsnosti povrchu metodou holografické interferometrie

Investor: Czech Science Foundation, Realisation of thelaboratory instrument for surface roughness measurement by holographic interferometry

• GA202/01/1110, research and development project: Name: Optické a mechanické vlastnosti tenkých vrstev DLC:Si připravených PECVD metodou

Investor: Czech Science Foundation, Optical and mechanical properties of DLC : Si thin films prepared by the PECVD method