STRAŇÁK, Vítězslav, Pavel SLAVÍČEK, Zdeněk NAVRÁTIL, Petr ADÁMEK, Milan TICHÝ, Petr ŠPATENKA a David TRUNEC. Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy. Czech. J. Phys. Praha: Institute of Physics Academy of Sciences, 2004, roč. 2004, č. 54, s. C970-C975, 6 s. ISSN 0011-4626. |
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@article{555948, author = {Straňák, Vítězslav and Slavíček, Pavel and Navrátil, Zdeněk and Adámek, Petr and Tichý, Milan and Špatenka, Petr and Trunec, David}, article_location = {Praha}, article_number = {54}, keywords = {microwave plasma; surfatron; probe diagnostics; optical emission spectroscopy}, language = {eng}, issn = {0011-4626}, journal = {Czech. J. Phys.}, title = {Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy}, volume = {2004}, year = {2004} }
TY - JOUR ID - 555948 AU - Straňák, Vítězslav - Slavíček, Pavel - Navrátil, Zdeněk - Adámek, Petr - Tichý, Milan - Špatenka, Petr - Trunec, David PY - 2004 TI - Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy JF - Czech. J. Phys. VL - 2004 IS - 54 SP - C970-C975 EP - C970-C975 PB - Institute of Physics Academy of Sciences SN - 00114626 KW - microwave plasma KW - surfatron KW - probe diagnostics KW - optical emission spectroscopy N2 - Applications of plasma sources in technology, medicine and biomedicine are already known for a long time. Our work is focused on diagnostics and applications of a microwave plasma source in these areas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at 2.45 GHz in the output power range (0 - 300) W, which creates plasma from the working gas flowing through the quartz nozzle. We present results of diagnostics of generated plasma at nozzle exit at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double Langmuir probe measurement and optical emission spectroscopy. ER -
STRAŇÁK, Vítězslav, Pavel SLAVÍČEK, Zdeněk NAVRÁTIL, Petr ADÁMEK, Milan TICHÝ, Petr ŠPATENKA a David TRUNEC. Diagnostics of surfatron-generated plasma by probe measurements and emission spectroscopy. \textit{Czech. J. Phys.}. Praha: Institute of Physics Academy of Sciences, 2004, roč.~2004, č.~54, s.~C970-C975, 6 s. ISSN~0011-4626.
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