| VAŠINA, Petr, Marcel MEŠKO, Michel TOUZEAU, Jean BRETAGNE a Mihai GANCIU. Fast dynamics of ionized species in high power pulsed magnetron discharge. In Bulletin of the American Physical Society, Series II, Vol. 49, No. 5. Melville: American Institute for Physics, 2004, s. 56-56. ISBN 0003-0503. |
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@inproceedings{564329,
author = {Vašina, Petr and Meško, Marcel and Touzeau, Michel and Bretagne, Jean and Ganciu, Mihai},
address = {Melville},
booktitle = {Bulletin of the American Physical Society, Series II, Vol. 49, No. 5},
keywords = {preionization; pulsed magnetron discharge; copper},
language = {eng},
location = {Melville},
isbn = {0003-0503},
pages = {56-56},
publisher = {American Institute for Physics},
title = {Fast dynamics of ionized species in high power pulsed magnetron discharge},
year = {2004}
}
TY - JOUR
ID - 564329
AU - Vašina, Petr - Meško, Marcel - Touzeau, Michel - Bretagne, Jean - Ganciu, Mihai
PY - 2004
TI - Fast dynamics of ionized species in high power pulsed magnetron discharge
PB - American Institute for Physics
CY - Melville
SN - 00030503
KW - preionization
KW - pulsed magnetron discharge
KW - copper
N2 - A high power density 1kW/cm2 preionized pulsed magnetron plasma was investigated. Applied voltage of 1 kV caused fast magnetron current increase, and, after few microseconds, dense plasma was formed characterized by a pressure independent value of 40 A for a 3 cm copper cathode. For times higher than 5 microsecond, plasma composition was dominated by metal ions and selfsputtering process took place.
ER -
VAŠINA, Petr, Marcel MEŠKO, Michel TOUZEAU, Jean BRETAGNE a Mihai GANCIU. Fast dynamics of ionized species in high power pulsed magnetron discharge. In \textit{Bulletin of the American Physical Society, Series II, Vol. 49, No. 5}. Melville: American Institute for Physics, 2004, s.~56-56. ISBN~0003-0503.
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