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@inproceedings{566485, author = {Mikulík, Petr}, address = {Rožnov pod Radhoštěm}, booktitle = {Proceedings of International Conference Silicon-2004}, keywords = {clean room; silicon; chip}, language = {eng}, location = {Rožnov pod Radhoštěm}, pages = {54-55}, publisher = {Karel Vojtěchovský}, title = {Project of a clean room laboratory for silicon device technology at the Masaryk University}, year = {2004} }
TY - JOUR ID - 566485 AU - Mikulík, Petr PY - 2004 TI - Project of a clean room laboratory for silicon device technology at the Masaryk University PB - Karel Vojtěchovský CY - Rožnov pod Radhoštěm KW - clean room KW - silicon KW - chip N2 - The paper presents ideas, motivation and plans the the projection of a clean room laboratory for silicon device technology at the Masaryk University. ER -
MIKULÍK, Petr. Project of a clean room laboratory for silicon device technology at the Masaryk University. In \textit{Proceedings of International Conference Silicon-2004}. Rožnov pod Radhoštěm: Karel Vojtěchovský, 2004, s.~54-55.
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