2004
Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry
KANICKÝ, Viktor, Hans-Rudolf KUHN a Detlef GUENTHERZákladní údaje
Originální název
Depth profile studies of ZrTiN coatings by laser ablation inductively coupled plasma mass spectrometry
Název česky
Studium hloubkovch profil plazmov deponovanch povlak ZrTiN pomoc laserov ablace s hmotnostn spektrometri v indukn vzanm plazmatu
Autoři
KANICKÝ, Viktor (203 Česká republika, garant), Hans-Rudolf KUHN (756 Švýcarsko) a Detlef GUENTHER (756 Švýcarsko)
Vydání
Analytical and Bioanalytical Chemistry, Heidelberg, Springer-Verlag GmbH, 2004, 1618-2642
Další údaje
Jazyk
angličtina
Typ výsledku
Článek v odborném periodiku
Obor
10406 Analytical chemistry
Stát vydavatele
Německo
Utajení
není předmětem státního či obchodního tajemství
Impakt faktor
Impact factor: 2.098
Kód RIV
RIV/00216224:14310/04:00011020
Organizační jednotka
Přírodovědecká fakulta
UT WoS
000224528900007
Klíčová slova anglicky
Laser ablation - Inductively coupled plasma mass spectrometry - Excimer laser - Beam homogenizer - ZrTiN - Coating - Depth profiling - Depth resolution - Aspect ratio
Změněno: 28. 6. 2007 16:36, prof. RNDr. Viktor Kanický, DrSc.
V originále
Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3 and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters 4-80 ěm, revealed that the steady-state signals of pure coating and pure substrate (out of interface) were obtained at crater diameters between 20-40 ěm. Depth resolution defined by means of slopes of tangents in the layer interface region depends on the pit diameter with optimum in the range of 20-40 ěm and makes 0.6 ěm for 20-ěm pit. In-depth variation of concentration of coating constituent (Ti) was proved almost identically using two different laser/ICP systems.
Česky
Abstract Feasibility of depth profiling was studied using a 193 nm ArF* excimer laser ablation system (GeoLas, MicroLas, Goettingen, Germany) with the lens-array-based beam homogenizer in combination with ICP-QMS Agilent 7500. Two ablation cells (20 cm3 and 1.5 cm3) were compared at the laser repetition rate of 1Hz, laser beam energy of 135 mJ and the carrier gas flow rate 1.5 L/min He + 0.78 L/min Ar. Dimensions of ablation cell are important parameters for signal tailing, however; very small cell volumes (e.g. 1.5 cm3) may cause memory effects, which can be probably explained by dominant inertial losses of aerosol on cell walls with its delayed mobilization. The 20-cm3-ablation cell seems to be appropriate for depth profiling by continuous single-hole drilling. The study of influence of the pit diameter magnitude on courses of waning and emerging signals under small crater depth/diameter aspect ratio, which ranges between 0.75 and 0.0375 for the 3-ěm thick coatings and pit diameters 4-80 ěm, revealed that the steady-state signals of pure coating and pure substrate (out of interface) were obtained at crater diameters between 20-40 ěm. Depth resolution defined by means of slopes of tangents in the layer interface region depends on the pit diameter with optimum in the range of 20-40 ěm and makes 0.6 ěm for 20-ěm pit. In-depth variation of concentration of coating constituent (Ti) was proved almost identically using two different laser/ICP systems.
Návaznosti
| MSM 143100003, záměr |
|