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@inproceedings{569268,
author = {Brzobohatý, Oto and Trunec, David},
address = {Podbanske, Slovakia},
booktitle = {SAPP XV},
keywords = {secondary electrons; computer simulation},
language = {eng},
location = {Podbanske, Slovakia},
isbn = {80-223-2018-8},
pages = {135-137},
publisher = {Karol Hensel},
title = {The Role of Secondary Electrons in Low Pressure RF Discharge via Computer Simulation},
year = {2005}
}
TY - JOUR
ID - 569268
AU - Brzobohatý, Oto - Trunec, David
PY - 2005
TI - The Role of Secondary Electrons in Low Pressure RF Discharge via Computer Simulation
PB - Karol Hensel
CY - Podbanske, Slovakia
SN - 8022320188
KW - secondary electrons
KW - computer simulation
N2 - In this contribution we present a study of the role of secondary electrons in low pressure RF discharge via computer simulation. We have used particle simulation Particle In Cell Monte Carlo (PIC-MC) method. We have shown that the secondary electron emission coefficient (SEC) of electrodes affects plasma density. The change of the SEC from 0.1 to 0.2 induces an increase of plasma density up to 30%. We determined that about 30 % of all electrons in plasma are secondary electrons and electrons created in ionization collisions of secondary electrons. More than half of all ions in plasma are ions, created in ionization collisions of secondary electrons. We have calculated many further characteristics of secondary particles.
ER -
BRZOBOHATÝ, Oto a David TRUNEC. The Role of Secondary Electrons in Low Pressure RF Discharge via Computer Simulation. In \textit{SAPP XV}. Podbanske, Slovakia: Karol Hensel, 2005, s.~135-137, 2 s. ISBN~80-223-2018-8.
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