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@inproceedings{589082, author = {Brzobohatý, Oto and Trunec, David}, address = {Prague}, booktitle = {WDS 2005 - Proceedings of Contributed Papers}, keywords = {computer simulation; rf glow discharg; secondary electrons}, language = {eng}, location = {Prague}, isbn = {80-86732-59-2}, pages = {306-313}, publisher = {MATFYZPRESS}, title = {The Role of Secondary Electrons in Low Pressure rf Glow Discharge}, year = {2005} }
TY - JOUR ID - 589082 AU - Brzobohatý, Oto - Trunec, David PY - 2005 TI - The Role of Secondary Electrons in Low Pressure rf Glow Discharge PB - MATFYZPRESS CY - Prague SN - 8086732592 KW - computer simulation KW - rf glow discharg KW - secondary electrons N2 - We concerned on the role of secondary electrons in low pressure rf glow discharge. The Particle in Cell/Monte Carlo computer simulations (PIC/MC) was applied to simulate the discharge. The influence of secondary electron emission yield (SEY) on the plasma density was studied. Furthermore the relative density and the electron energy probability function of secondary particles, i.e., secondary electrons and the products of ionizing collisions of secondary electrons was determined. We found that the secondary particles play very important role in this type of discharge. The relative density of secondary electrons created on electrodes is 2-10%, 5-15% for the value of SEY = 0.1, 0.2 respectively. But due to the high electric intensity in electrode sheaths these electrons have relatively high energy and therefore they can ionize neutral atoms. As consequence of this the relative density of the secondary electrons (secondaries) and electrons created in ionizing collisions of the secondaries is more than 20% and the relative density of ions created in ionizing collisions of the secondaries is more than 20%, 40% for value of SEY = 0.1, 0.2, respectively. ER -
BRZOBOHATÝ, Oto a David TRUNEC. The Role of Secondary Electrons in Low Pressure rf Glow Discharge. In \textit{WDS 2005 - Proceedings of Contributed Papers}. Prague: MATFYZPRESS, 2005, s.~306-313, 6 s. ISBN~80-86732-59-2.
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