BURŠÍKOVÁ, Vilma, Petr KLAPETEK, Angelique BOUSQUET a Marek ELIÁŠ. Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements. Jemná mechanika a optika. Přerov: Physical Institute, ASCR, 2005, roč. 50, 11_12, s. 323-326. ISSN 0447-6441. |
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@article{593724, author = {Buršíková, Vilma and Klapetek, Petr and Bousquet, Angelique and Eliáš, Marek}, article_location = {Přerov}, article_number = {11_12}, keywords = {nanoindentation; AFM; thin films; mechanical properties}, language = {eng}, issn = {0447-6441}, journal = {Jemná mechanika a optika}, title = {Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements}, volume = {50}, year = {2005} }
TY - JOUR ID - 593724 AU - Buršíková, Vilma - Klapetek, Petr - Bousquet, Angelique - Eliáš, Marek PY - 2005 TI - Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements JF - Jemná mechanika a optika VL - 50 IS - 11_12 SP - 323-326 EP - 323-326 PB - Physical Institute, ASCR SN - 04476441 KW - nanoindentation KW - AFM KW - thin films KW - mechanical properties N2 - Study of the mechanical properties of thin films prepared by PECVD using combined nanoindentation and AFM measurements. ER -
BURŠÍKOVÁ, Vilma, Petr KLAPETEK, Angelique BOUSQUET a Marek ELIÁŠ. Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements. \textit{Jemná mechanika a optika}. Přerov: Physical Institute, ASCR, 2005, roč.~50, 11\_{}12, s.~323-326. ISSN~0447-6441.
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