Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure
Microwave Torch

D 2005

Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch

JAŠEK, Ondřej; Marek ELIÁŠ; Martin BUBLAN; Vít KUDRLE; Lenka ZAJÍČKOVÁ et al.

Basic information

Original name

Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch

Name in Czech

Syntéza uhlíkových nanotrubek v mikrovlnném výboji za atmosférického tlaku metodou PECVD

Authors

JAŠEK, Ondřej; Marek ELIÁŠ; Martin BUBLAN; Vít KUDRLE; Lenka ZAJÍČKOVÁ; Jiřina MATĚJKOVÁ; Antonín REK; Jiří BURŠÍK and Magdaléna KADLĚČÍKOVÁ

Edition

1. vyd. Bratislava, Proceedings of 15th Symposion on Application of Plasma Processes, p. 187-188, 2 pp. 2005

Publisher

Comenius University Press

Other information

Language

English

Type of outcome

Proceedings paper

Field of Study

10305 Fluids and plasma physics

Country of publisher

Slovakia

Confidentiality degree

is not subject to a state or trade secret

Marked to be transferred to RIV

Yes

RIV identification code

RIV/00216224:14310/05:00012989

Organization unit

Faculty of Science

ISBN

80-223-2018-8

Keywords in English

carbon nanotubes; microwave discharge; scanning electron microscopy

Abstract

ORIG CZ

In the original language

In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy.

In Czech

Uhlíkové nanotrubky byly připraveny v mikrovlnném výboji za atmosférického tlaku buzeném ve směsi metanu,vodíku a argonu na Si/SiO2/Fe substrátech. Optimalizací podmínek bylo možno připravit čisté, velmi dobře uspořádané vrtsvy dlouhých nanotrubek (několik desítek mikrometrů) s vysokou růstovou rychlostí. Deponované vrstvy byly analyzovány skenovací elektronovou mikroskopií a plazma výboje bylo analyzováno optickou emisní spektroskopií.

Links

GA202/05/0607, research and development project

Name: Příprava uhlíkových mikro- a nanostruktur plazmovými technologiemi

Investor: Czech Science Foundation, Synthesis of carbon micro- and nanostructures by plasma technologies

Cite

JAŠEK, Ondřej; Marek ELIÁŠ; Martin BUBLAN; Vít KUDRLE; Lenka ZAJÍČKOVÁ; Jiřina MATĚJKOVÁ; Antonín REK; Jiří BURŠÍK and Magdaléna KADLĚČÍKOVÁ. Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch. In Proceedings of 15th Symposion on Application of Plasma Processes. 1st ed. Bratislava: Comenius University Press, 2005, p. 187-188. ISBN 80-223-2018-8.

@inproceedings{602425,
   author = {Jašek, Ondřej and Eliáš, Marek and Bublan, Martin and Kudrle, Vít and Zajíčková, Lenka and Matějková, Jiřina and Rek, Antonín and Buršík, Jiří and Kadlěčíková, Magdaléna},
   address = {Bratislava},
   booktitle = {Proceedings of 15th Symposion on Application of Plasma Processes},
   edition = {1},
   keywords = {carbon nanotubes; microwave discharge; scanning electron microscopy},
   language = {eng},
   location = {Bratislava},
   isbn = {80-223-2018-8},
   pages = {187-188},
   publisher = {Comenius University Press},
   title = {Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch},
   year = {2005}
}

TY  - CONF
ID  - 602425
AU  - Jašek, Ondřej - Eliáš, Marek - Bublan, Martin - Kudrle, Vít - Zajíčková, Lenka - Matějková, Jiřina - Rek, Antonín - Buršík, Jiří - Kadlěčíková, Magdaléna
PY  - 2005
TI  - Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch
PB  - Comenius University Press
CY  - Bratislava
SN  - 8022320188
KW  - carbon nanotubes
KW  - microwave discharge
KW  - scanning electron microscopy
N2  - In present paper we describe a synthesis of carbon nanotubes in microwave plasma torch at atmospheric pressure from the mixture of methane, hydrogen and argon on Si/SiO2/Fe substrate. Using this relatively novel method and under optimized conditions pure, well aligned and long nanotubes were grown with high deposition rate. The layers were analyzed by scanning electron microscopy and discharge plasma was analyzed by optical emission spectroscopy.
ER  -

JAŠEK, Ondřej; Marek ELIÁŠ; Martin BUBLAN; Vít KUDRLE; Lenka ZAJÍČKOVÁ; Jiřina MATĚJKOVÁ; Antonín REK; Jiří BURŠÍK and Magdaléna KADLĚČÍKOVÁ. Plasma Enchanced CVD of Carbon Nanotubes in Atmosferic Pressure Microwave Torch. In \textit{Proceedings of 15th Symposion on Application of Plasma Processes}. 1st ed. Bratislava: Comenius University Press, 2005, p.~187-188. ISBN~80-223-2018-8.

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