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@inproceedings{605326,
author = {Ohlídal, Ivan and Ohlídal, Miloslav and Franta, Daniel and Čudek, Vladimír and Buršíková, Vilma and Klapetek, Petr},
address = {Bellingham, Washington, USA},
booktitle = {8-th International Symposium on Laser Metrology},
keywords = {DLC films; mechanical stress; two-beam interferometry; chromatic aberration method},
language = {eng},
location = {Bellingham, Washington, USA},
isbn = {0-8194-5757-4},
pages = {717-728},
publisher = {SPIE - The International Society for Optical Engineering},
title = {Optical measurement of mechanical stresses in diamond-like carbon films},
url = {http://hydra.physics.muni.cz/~franta/bib/SPIE5776_717.html},
year = {2005}
}
TY - JOUR
ID - 605326
AU - Ohlídal, Ivan - Ohlídal, Miloslav - Franta, Daniel - Čudek, Vladimír - Buršíková, Vilma - Klapetek, Petr
PY - 2005
TI - Optical measurement of mechanical stresses in diamond-like carbon films
PB - SPIE - The International Society for Optical Engineering
CY - Bellingham, Washington, USA
SN - 0819457574
KW - DLC films
KW - mechanical stress
KW - two-beam interferometry
KW - chromatic aberration method
UR - http://hydra.physics.muni.cz/~franta/bib/SPIE5776_717.html
N2 - In this paper the mechanical stresses taking place in diamond like thin films prepared by the plasma enhanced chemical vapor deposition onto silicon single crystal substrates are studied. For determination of the stress values the Stoney's formula is used. The values of the film thicknesses are determined using the combined method of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The values of the curvature radii of the deformed silicon substrates in consequence of the film stresses are evaluated using interferometric method based on two-beam interferometry and chromatic aberration method. The dependence of the mechanical stress inside these films on their thickness values is determined. It is found that this dependence can be approximate by the straight-line. The results achieved for the mechanical stresses obtained by both the optical methods, i.e. by the interferometric and chromatic aberration method, are compared. It is shown that within the experimental accuracy the stress values determined using both these method are identical. Thus, it is shown that the chromatic aberration method is suitable for measuring the mechanical stresses inside the thin solid films and it is the competitive method for the other optical methods utilized for this purpose so far.
ER -
OHLÍDAL, Ivan, Miloslav OHLÍDAL, Daniel FRANTA, Vladimír ČUDEK, Vilma BURŠÍKOVÁ and Petr KLAPETEK. Optical measurement of mechanical stresses in diamond-like carbon films. In \textit{8-th International Symposium on Laser Metrology}. Bellingham, Washington, USA: SPIE - The International Society for Optical Engineering, 2005, p.~717-728. ISBN~0-8194-5757-4.
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