| ŠILER, Martin, Ivan OHLÍDAL, Daniel FRANTA, Alberto MONTAIGNE-RAMIL, Alberta BONANNI, David STIFTER a Helmut SITTER. Optical characterization of double layers containing epitaxial ZnSe and ZnTe films. Journal of Modern Optics. London, UK: Taylor and Francis, LtD, 2005, roč. 52, č. 4, s. 583-602. ISSN 0950-0340. |
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@article{605344,
author = {Šiler, Martin and Ohlídal, Ivan and Franta, Daniel and MontaigneandRamil, Alberto and Bonanni, Alberta and Stifter, David and Sitter, Helmut},
article_location = {London, UK},
article_number = {4},
keywords = {ellipsometry; spectrophotometry; epitaxial layer},
language = {eng},
issn = {0950-0340},
journal = {Journal of Modern Optics},
title = {Optical characterization of double layers containing epitaxial ZnSe and ZnTe films},
url = {http://hydra.physics.muni.cz/~franta/bib/JMO52_583.html},
volume = {52},
year = {2005}
}
TY - JOUR
ID - 605344
AU - Šiler, Martin - Ohlídal, Ivan - Franta, Daniel - Montaigne-Ramil, Alberto - Bonanni, Alberta - Stifter, David - Sitter, Helmut
PY - 2005
TI - Optical characterization of double layers containing epitaxial ZnSe and ZnTe films
JF - Journal of Modern Optics
VL - 52
IS - 4
SP - 583-602
EP - 583-602
PB - Taylor and Francis, LtD
SN - 09500340
KW - ellipsometry
KW - spectrophotometry
KW - epitaxial layer
UR - http://hydra.physics.muni.cz/~franta/bib/JMO52_583.html
N2 - In this paper results of the optical characterisation of double layers consisting of ZnTe and ZnSe thin films prepared by molecular beam epitaxy onto GaAs single crystal substrates are presented. For this optical characterisation the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used in multi-sample modification applied within the spectral region 230-850 nm. Using this method the spectral dependences of the optical constants of the upper ZnTe thin films are determined within the spectral region mentioned above. Spectral dependences of the optical constants of the lower ZnSe thin films were determined within the spectral region 450-850 nm. Boundary roughness of these double layers and overlayers is respected. RMS values of the heights of the irregularities of the boundaries and thicknesses and optical constants of the overlayers are determined by means of the combined optical method as well. The uppermost boundaries of the double layers are, moreover, analysed using atomic force microscopy because of verification of the RMS values of these boundaries obtained by the optical method. The spectral dependences of the optical constants of the upper ZnTe films and lower ZnSe films determined in this paper are compared with those presented for ZnTe single layers and ZnSe single layers in the literature.
ER -
ŠILER, Martin, Ivan OHLÍDAL, Daniel FRANTA, Alberto MONTAIGNE-RAMIL, Alberta BONANNI, David STIFTER a Helmut SITTER. Optical characterization of double layers containing epitaxial ZnSe and ZnTe films. \textit{Journal of Modern Optics}. London, UK: Taylor and Francis, LtD, 2005, roč.~52, č.~4, s.~583-602. ISSN~0950-0340.
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