| BURŠÍKOVÁ, Vilma, Petr SLÁDEK a Pavel SŤAHEL. Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates. In NENAMAT International Conference Proceedings NANO05. 1. vyd. Brno: Brno University of Technology, Faculty of Mechanical Engineering, 2005, s. 396-399. ISBN 80-214-3085-0. |
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@inproceedings{622624,
author = {Buršíková, Vilma and Sládek, Petr and Sťahel, Pavel},
address = {Brno},
booktitle = {NENAMAT International Conference Proceedings NANO05},
edition = {1.},
keywords = {Mechanical properties; Amorphous silicon; Nanocrystalline Silicon},
language = {eng},
location = {Brno},
isbn = {80-214-3085-0},
pages = {396-399},
publisher = {Brno University of Technology, Faculty of Mechanical Engineering},
title = {Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates},
year = {2005}
}
TY - JOUR
ID - 622624
AU - Buršíková, Vilma - Sládek, Petr - Sťahel, Pavel
PY - 2005
TI - Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates
PB - Brno University of Technology, Faculty of Mechanical Engineering
CY - Brno
SN - 8021430850
KW - Mechanical properties
KW - Amorphous silicon
KW - Nanocrystalline Silicon
N2 - The objective of our study was to investigate the mechanical properties of amorphous and nanocrystalline silicon thin layer deposited on flexible sustrates by means of depth sensing intendation method.
ER -
BURŠÍKOVÁ, Vilma, Petr SLÁDEK a Pavel SŤAHEL. Mechanical properties of amorphous and nanocrystalline silicon thin films on flexible substrates. In \textit{NENAMAT International Conference Proceedings NANO05}. 1. vyd. Brno: Brno University of Technology, Faculty of Mechanical Engineering, 2005, s.~396-399. ISBN~80-214-3085-0.
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