| ANTOŠ, Roman, Ivan OHLÍDAL, Jan MISTRÍK, K. MURAKAMI, Tomuo YAMAGUCHI, J. PIŠTORA, M. HORIE and Štefan VIŠŇOVSKÝ. Spectroscopic ellipsometry on lamellar gratings. Applied Surface Science. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol. 244, 1-4, p. 225-229. ISSN 0169-4332. |
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@article{630341,
author = {Antoš, Roman and Ohlídal, Ivan and Mistrík, Jan and Murakami, K. and Yamaguchi, Tomuo and Pištora, J. and Horie, M. and Višňovský, Štefan},
article_location = {USA},
article_number = {1-4},
keywords = {optical metrology; scatterometry; spectroscopic ellipsometry; diffraction grating; wood anomaly; RCWA},
language = {eng},
issn = {0169-4332},
journal = {Applied Surface Science},
title = {Spectroscopic ellipsometry on lamellar gratings},
volume = {244},
year = {2005}
}
TY - JOUR
ID - 630341
AU - Antoš, Roman - Ohlídal, Ivan - Mistrík, Jan - Murakami, K. - Yamaguchi, Tomuo - Pištora, J. - Horie, M. - Višňovský, Štefan
PY - 2005
TI - Spectroscopic ellipsometry on lamellar gratings
JF - Applied Surface Science
VL - 244
IS - 1-4
SP - 225-229
EP - 225-229
PB - ELSEVIER (NORTH-HOLLAND)
SN - 01694332
KW - optical metrology
KW - scatterometry
KW - spectroscopic ellipsometry
KW - diffraction grating
KW - wood anomaly
KW - RCWA
N2 - Deep lamellar diffraction gratings fabricated by etching a transparent quartz plate are studied using spectroscopic ellipsometry. The rigorous coupled-wave analysis is used to calculate the optical response of the gratings. Three parameters of the rectangular profile are determined by utilizing the least-square method. Detailed investigation of the spectral dependences demonstrates the uniqueness of the solution. Observing the spectral dependences of Wood anomalies suggests that even complicated profiles can be fitted with high authenticity.
ER -
ANTOŠ, Roman, Ivan OHLÍDAL, Jan MISTRÍK, K. MURAKAMI, Tomuo YAMAGUCHI, J. PIŠTORA, M. HORIE and Štefan VIŠŇOVSKÝ. Spectroscopic ellipsometry on lamellar gratings. \textit{Applied Surface Science}. USA: ELSEVIER (NORTH-HOLLAND), 2005, vol.~244, 1-4, p.~225-229. ISSN~0169-4332.
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