| FRGALA, Zdeněk, Ondřej JAŠEK, Monika KARÁSKOVÁ, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Jiřina MATĚJKOVÁ, Antonin REK, Petr KLAPETEK a Jiří BURŠÍK. Microwave PECVD of nanocrystalline diamond with rf induced bias nucleation. Czechoslovak Journal of Physics B. Praha: Institute of Physics, AV ČR, roč. 56, č. 1, s. B1218-B1223, 6 s. ISSN 0011-4626. 2006. |
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@article{698650,
author = {Frgala, Zdeněk and Jašek, Ondřej and Karásková, Monika and Zajíčková, Lenka and Buršíková, Vilma and Franta, Daniel and Matějková, Jiřina and Rek, Antonin and Klapetek, Petr and Buršík, Jiří},
article_location = {Praha},
article_number = {1},
keywords = {nanocrystalline diamond; plasma enhanced chemical vapor deposition; self-bias},
language = {eng},
issn = {0011-4626},
journal = {Czechoslovak Journal of Physics B},
title = {Microwave PECVD of nanocrystalline diamond with rf induced bias nucleation},
volume = {56},
year = {2006}
}
TY - JOUR
ID - 698650
AU - Frgala, Zdeněk - Jašek, Ondřej - Karásková, Monika - Zajíčková, Lenka - Buršíková, Vilma - Franta, Daniel - Matějková, Jiřina - Rek, Antonin - Klapetek, Petr - Buršík, Jiří
PY - 2006
TI - Microwave PECVD of nanocrystalline diamond with rf induced bias nucleation
JF - Czechoslovak Journal of Physics B
VL - 56
IS - 1
SP - B1218-B1223
EP - B1218-B1223
PB - Institute of Physics, AV ČR
SN - 00114626
KW - nanocrystalline diamond
KW - plasma enhanced chemical vapor deposition
KW - self-bias
N2 - Nanocrystalline diamond film was deposited by microwave CVD in the ASTeX type reactor on a mirror polished (111) oriented n-doped silicon substrate. The deposition mixture consisted of 9 % of methane in hydrogen. The applied microwave power (2.45 GHz) and pressure were 850 W and 7.5 kPa, respectively. The substrate temperature was 1 090 K. The diamond nucleation process was enhanced by rf induced dc self {bias of -125 V. The film exhibited very low roughness (rms of heights 9.1 nm). Its hardness and elastic modules were 70 and 375 GPa, respectively. The optical constants were determined by combination of spectroscopic ellipsometry and reflectometry employing the Rayleigh-Rice theory for the roughness and the dispersion model of optical constants based on the parameterization of densities of states. The deposition rate was 57 nm/min including the 5 min nucleation step.
ER -
FRGALA, Zdeněk, Ondřej JAŠEK, Monika KARÁSKOVÁ, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Jiřina MATĚJKOVÁ, Antonin REK, Petr KLAPETEK a Jiří BURŠÍK. Microwave PECVD of nanocrystalline diamond with rf induced bias nucleation. \textit{Czechoslovak Journal of Physics B}. Praha: Institute of Physics, AV ČR, roč.~56, č.~1, s.~B1218-B1223, 6 s. ISSN~0011-4626. 2006.
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