BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL a Jiří BURŠÍK. Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique. Journal of Non-Crystalline Solids. Nizozemsko: Elsevier Science B.V., 2006, roč. 352, 9-20, s. 1242-1245. ISSN 0022-3093. |
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@article{699212, author = {Buršíková, Vilma and Sládek, Petr and Sťahel, Pavel and Buršík, Jiří}, article_location = {Nizozemsko}, article_number = {9-20}, keywords = {amorphous semiconductors; silicon; mechanical properties; creep; hardness; intendation; microintendation;ELASTIC-MODULUS; COATED SYSTEMS}, language = {eng}, issn = {0022-3093}, journal = {Journal of Non-Crystalline Solids}, title = {Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique}, volume = {352}, year = {2006} }
TY - JOUR ID - 699212 AU - Buršíková, Vilma - Sládek, Petr - Sťahel, Pavel - Buršík, Jiří PY - 2006 TI - Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique JF - Journal of Non-Crystalline Solids VL - 352 IS - 9-20 SP - 1242-1245 EP - 1242-1245 PB - Elsevier Science B.V. SN - 00223093 KW - amorphous semiconductors KW - silicon KW - mechanical properties KW - creep KW - hardness KW - intendation KW - microintendation;ELASTIC-MODULUS KW - COATED SYSTEMS N2 - This work concerns the characterisation of mechanical properties of thin amorphous and microcrystalline silicon films deposited on glass and polyethylene terephthalate substrates. The film/substrate indentation response has been investigated from the near surface up to film/substrate interface using depth sensing indentation technique. The universal hardness, Vickers hardness, elastic modulus, fracture toughness and creep resistance of the studied films have been determined. Particular attention has been paid to the effects of the flexible viscoelastic-plastic substrate on the indentation response of the film/substrate system. (c) 2006 Elsevier B.V. All rights reserved. ER -
BURŠÍKOVÁ, Vilma, Petr SLÁDEK, Pavel SŤAHEL a Jiří BURŠÍK. Mechanical properties of thin silicon films deposited on glass and plastic substrates studied by depth sensing indentation technique. \textit{Journal of Non-Crystalline Solids}. Nizozemsko: Elsevier Science B.V., 2006, roč.~352, 9-20, s.~1242-1245. ISSN~0022-3093.
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