| MEDUŇA, Mojmír, Jiří NOVÁK, Václav HOLÝ, Günther BAUER, Claudiu FALUB, Soichiro TSUJINO and Detlev GRÜTZMACHER. In-situ investigations of Si and Ge interdiffusion in Si cascade structures. Synchrotron Radiation in Natural Sciences. Warsaw: Polish Synchrotron Radiation Society, 2006, vol. 5, 1-2, p. 76. ISSN 1644-7190. |
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@article{710328,
author = {Meduňa, Mojmír and Novák, Jiří and Holý, Václav and Bauer, Günther and Falub, Claudiu and Tsujino, Soichiro and Grützmacher, Detlev},
article_location = {Warsaw},
article_number = {1-2},
keywords = {x-ray reflectivity; multilayers; interdiffusion; SiGe},
language = {eng},
issn = {1644-7190},
journal = {Synchrotron Radiation in Natural Sciences},
title = {In-situ investigations of Si and Ge interdiffusion in Si cascade structures},
volume = {5},
year = {2006}
}
TY - JOUR
ID - 710328
AU - Meduňa, Mojmír - Novák, Jiří - Holý, Václav - Bauer, Günther - Falub, Claudiu - Tsujino, Soichiro - Grützmacher, Detlev
PY - 2006
TI - In-situ investigations of Si and Ge interdiffusion in Si cascade structures
JF - Synchrotron Radiation in Natural Sciences
VL - 5
IS - 1-2
SP - 76
EP - 76
PB - Polish Synchrotron Radiation Society
SN - 16447190
KW - x-ray reflectivity
KW - multilayers
KW - interdiffusion
KW - SiGe
N2 - We focus on investigation of temperature stability of simple strain symmetrized SiGe/Si multilayers designed similarly as the complicated quantum cascade structures with Ge content 30% and 80%. X-ray reflectivity and diffraction reciprocal space maps for all structures have been recorded at room temperature and during several isothermal annealing processes for temperatures ranging from 550 C up to 824 C.
ER -
MEDUŇA, Mojmír, Jiří NOVÁK, Václav HOLÝ, Günther BAUER, Claudiu FALUB, Soichiro TSUJINO and Detlev GRÜTZMACHER. In-situ investigations of Si and Ge interdiffusion in Si cascade structures. \textit{Synchrotron Radiation in Natural Sciences}. Warsaw: Polish Synchrotron Radiation Society, 2006, vol.~5, 1-2, p.~76. ISSN~1644-7190.
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