MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Günther BAUER a Detlev GRÜTZMACHER. High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures. Materials Structure in Chemistry, Biology, Physics and Technology. Praha, 2005, roč. 12, č. 2, s. 126. ISSN 1211-5894. |
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@article{710337, author = {Meduňa, Mojmír and Novák, Jiří and Falub, Claudiu and Bauer, Günther and Grützmacher, Detlev}, article_location = {Praha}, article_number = {2}, keywords = {interdiffusion; x-ray diffraction; reflectivity}, language = {eng}, issn = {1211-5894}, journal = {Materials Structure in Chemistry, Biology, Physics and Technology}, title = {High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures}, volume = {12}, year = {2005} }
TY - JOUR ID - 710337 AU - Meduňa, Mojmír - Novák, Jiří - Falub, Claudiu - Bauer, Günther - Grützmacher, Detlev PY - 2005 TI - High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures JF - Materials Structure in Chemistry, Biology, Physics and Technology VL - 12 IS - 2 SP - 126 EP - 126 SN - 12115894 KW - interdiffusion KW - x-ray diffraction KW - reflectivity N2 - From the temporal evolution of x-ray reflectivity data at high temperature, we obtained an evolution of Si-SiGe interfaces induced by diffusion. The results of our experiment demonstrate that the critical temperature for Ge inter-diffusion process in Si0.7Ge0.3 and Si0.2Ge0.8 depends not only on Ge content but also on the thickness of the individual layers. ER -
MEDUŇA, Mojmír, Jiří NOVÁK, Claudiu FALUB, Günther BAUER a Detlev GRÜTZMACHER. High Temperature in-situ Investigation of Si/SiGe Multilayers and Cascade Structures. \textit{Materials Structure in Chemistry, Biology, Physics and Technology}. Praha, 2005, roč.~12, č.~2, s.~126. ISSN~1211-5894.
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