| NAVRÁTIL, Zdeněk, David TRUNEC, Radek ŠMÍD a Lukáš LAZAR. Spatially resolved optical diagnostics of neon RF discharge. In MATÚŠKA, Ján a Štefan MATEJČÍK. Book of Abstracts of 16th Symposium on Application of Plasma Processes. Bratislava: Comenius University, Bratislava, 2007, s. 235-236. ISBN 978-808918613-6. |
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@inproceedings{711652,
author = {Navrátil, Zdeněk and Trunec, David and Šmíd, Radek and Lazar, Lukáš and Matúška, Ján and Matejčík, Štefan},
address = {Bratislava},
booktitle = {Book of Abstracts of 16th Symposium on Application of Plasma Processes},
keywords = {neon RF discharge; optical emission spectroscopy; collisional-radiative model},
language = {eng},
location = {Bratislava},
isbn = {978-808918613-6},
pages = {235-236},
publisher = {Comenius University, Bratislava},
title = {Spatially resolved optical diagnostics of neon RF discharge},
year = {2007}
}
TY - JOUR
ID - 711652
AU - Navrátil, Zdeněk - Trunec, David - Šmíd, Radek - Lazar, Lukáš - Matúška, Ján - Matejčík, Štefan
PY - 2007
TI - Spatially resolved optical diagnostics of neon RF discharge
PB - Comenius University, Bratislava
CY - Bratislava
SN - 9788089186136
KW - neon RF discharge
KW - optical emission spectroscopy
KW - collisional-radiative model
N2 - Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature.
ER -
NAVRÁTIL, Zdeněk, David TRUNEC, Radek ŠMÍD a Lukáš LAZAR. Spatially resolved optical diagnostics of neon RF discharge. In MATÚŠKA, Ján a Štefan MATEJČÍK. \textit{Book of Abstracts of 16th Symposium on Application of Plasma Processes}. Bratislava: Comenius University, Bratislava, 2007, s.~235-236. ISBN~978-808918613-6.
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