NAVRÁTIL, Zdeněk, David TRUNEC, Radek ŠMÍD a Lukáš LAZAR. Spatially resolved optical diagnostics of neon RF discharge. In MATÚŠKA, Ján a Štefan MATEJČÍK. Book of Abstracts of 16th Symposium on Application of Plasma Processes. Bratislava: Comenius University, Bratislava, 2007, s. 235-236. ISBN 978-808918613-6. |
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@inproceedings{711652, author = {Navrátil, Zdeněk and Trunec, David and Šmíd, Radek and Lazar, Lukáš and Matúška, Ján and Matejčík, Štefan}, address = {Bratislava}, booktitle = {Book of Abstracts of 16th Symposium on Application of Plasma Processes}, keywords = {neon RF discharge; optical emission spectroscopy; collisional-radiative model}, language = {eng}, location = {Bratislava}, isbn = {978-808918613-6}, pages = {235-236}, publisher = {Comenius University, Bratislava}, title = {Spatially resolved optical diagnostics of neon RF discharge}, year = {2007} }
TY - JOUR ID - 711652 AU - Navrátil, Zdeněk - Trunec, David - Šmíd, Radek - Lazar, Lukáš - Matúška, Ján - Matejčík, Štefan PY - 2007 TI - Spatially resolved optical diagnostics of neon RF discharge PB - Comenius University, Bratislava CY - Bratislava SN - 9788089186136 KW - neon RF discharge KW - optical emission spectroscopy KW - collisional-radiative model N2 - Capacitively coupled RF discharge in neon (13.56 MHz) was studied by spatially resolved optical emission spectroscopy and collisional-radiative model. Two discharge regimes at different pressures (10 and 80 Pa) were investigated. The measured intensities of prominent neon spectral lines in conjunction with the model were used to determine the electron temperature. ER -
NAVRÁTIL, Zdeněk, David TRUNEC, Radek ŠMÍD a Lukáš LAZAR. Spatially resolved optical diagnostics of neon RF discharge. In MATÚŠKA, Ján a Štefan MATEJČÍK. \textit{Book of Abstracts of 16th Symposium on Application of Plasma Processes}. Bratislava: Comenius University, Bratislava, 2007, s.~235-236. ISBN~978-808918613-6.
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