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@inproceedings{715455,
author = {Dvořák, Pavel and Janča, Jan},
address = {Bratislava},
booktitle = {16th Symposium on Application of Plasma Processes - Book of Abstracts},
keywords = {hydrogen; dissociation degree; plasma},
language = {eng},
location = {Bratislava},
isbn = {978-80-89186-13-6},
pages = {153-154},
publisher = {Union of Slovak Mathematicians and Physicists},
title = {Hydrogen dissociation degree in capacitively coupled discharge},
year = {2007}
}
TY - JOUR
ID - 715455
AU - Dvořák, Pavel - Janča, Jan
PY - 2007
TI - Hydrogen dissociation degree in capacitively coupled discharge
PB - Union of Slovak Mathematicians and Physicists
CY - Bratislava
SN - 9788089186136
KW - hydrogen
KW - dissociation degree
KW - plasma
N2 - Results of optical emission spectroscopy of hydrogen low-pressure capacitively coupled RF discharge are presented. It was shown, that the dissociation degree of hydrogen molecules was sensitive to the sheath voltages. Further, the plasma temperatures were measured.
ER -
DVOŘÁK, Pavel a Jan JANČA. Hydrogen dissociation degree in capacitively coupled discharge. In \textit{16th Symposium on Application of Plasma Processes - Book of Abstracts}. Bratislava: Union of Slovak Mathematicians and Physicists, 2007, s.~153-154. ISBN~978-80-89186-13-6.
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