Influence of methane on capacitively coupled oxygen discharge

DOLEŽAL, Vojtěch, Pavel DVOŘÁK and Jan JANČA. Influence of methane on capacitively coupled oxygen discharge. In 16th Symposium on Application of Plasma Processes - Book of Abstracts. Bratislava: Union of Slovak Mathematicians and Physicists, 2007, p. 149-150. ISBN 978-80-89186-13-6.

Basic information

Original name

Influence of methane on capacitively coupled oxygen discharge

Name in Czech

Vliv metanu na kapacitně vázaný kyslíkový výboj

Authors

DOLEŽAL, Vojtěch (203 Czech Republic, guarantor), Pavel DVOŘÁK (203 Czech Republic) and Jan JANČA (203 Czech Republic)

Edition

Bratislava, 16th Symposium on Application of Plasma Processes - Book of Abstracts, p. 149-150, 2 pp. 2007

Publisher

Union of Slovak Mathematicians and Physicists

---

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Slovakia

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/07:00020196

Organization unit

Faculty of Science

ISBN

978-80-89186-13-6

Keywords in English

oxygen; methane; capacitively coupled; plasma

Tags

capacitively coupled, Methane, Oxygen, plasma

---

Abstract

V originále

In this work the mixture of oxygen and a small amount (0-5%) of methane was studied. The measurements were carried out in low-pressure (6.5 Pa) capacitively coupled RF discharge. Positive ions and neutral particles were detected by mass spectrometer and ion energy analyzer. O2+ was the dominating ion in the discharge. Its amount was significantly decreased when a small amount of methane was added. H3O+ and carbon containing ions as C2H7+, CHO+ (C2H5+), CH3+ and CO+ were consequently detected. The flux of neutral particles were composed of dominant O2 which decreased with increasing amount of methane, and expected important product species as H2O, CO2 and CO.

In Czech

Vliv metanu na kyslíkový kapacitně vázaný výboj byl studován pomocí hmotnostního a energiového spektrometru. Dominantním iontem ve výboji byl kyslíkový iont O2+, jehož množství bylo výrazně redukováno přidáním příměsi metanu. Dále byly detekovány především ionty C2H7+, CHO+, CH3+ a cO+, neutrálním produktům reakcí přirozeně dominovaly H2O, CO2 a CO.

---

Links

GD202/03/H162, research and development project	Name: Pokročilé směry ve fyzice a chemii plazmatu Investor: Czech Science Foundation
MSM0021622411, plan (intention)	Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface