2007
Interdiffusion in SiGe alloys studied by x-rays
MEDUŇA, Mojmír; Jiří NOVÁK; Günther BAUER; Václav HOLÝ; Claudiu FALUB et. al.Basic information
Original name
Interdiffusion in SiGe alloys studied by x-rays
Name in Czech
Interdifúze v SiGe slitinách studovaná pomocí rtg
Authors
MEDUŇA, Mojmír (203 Czech Republic, guarantor); Jiří NOVÁK (203 Czech Republic); Günther BAUER (40 Austria); Václav HOLÝ (203 Czech Republic); Claudiu FALUB (642 Romania); Soichiro TSUJINO (392 Japan) and Detlev GRÜTZMACHER (276 Germany)
Edition
Materials Structure in Chemistry, Biology, Physics and Technology, Praha, 2007, 1211-5894
Other information
Language
English
Type of outcome
Article in a journal
Field of Study
10302 Condensed matter physics
Country of publisher
Czech Republic
Confidentiality degree
is not subject to a state or trade secret
RIV identification code
RIV/00216224:14310/07:00020385
Organization unit
Faculty of Science
Keywords in English
x-ray reflectivity; interdiffusion; SiGe
Tags
Tags
International impact
Changed: 31/1/2008 14:21, Mgr. Mojmír Meduňa, Ph.D.
In the original language
We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 780-830 C by x-ray diffraction. From the fits of reflectivity and diffraction we have obtained diffusion coeficients and activation energy for Ge content 50%.
In Czech
Studovali jsme SiGe/Si multivrstvy žíhané in-situ při teplotách v rozsahu 780-830 C pomocí rtg difrakce. Z fitování reflexe a difrakce jsme obdrželi difúzní koeficienty a aktivační energie pro obsah Ge 50%.
Links
| GP202/05/P286, research and development project |
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| MSM0021622410, plan (intention) |
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