J 2007

Interdiffusion in SiGe alloys studied by x-rays

MEDUŇA, Mojmír; Jiří NOVÁK; Günther BAUER; Václav HOLÝ; Claudiu FALUB et. al.

Basic information

Original name

Interdiffusion in SiGe alloys studied by x-rays

Name in Czech

Interdifúze v SiGe slitinách studovaná pomocí rtg

Authors

MEDUŇA, Mojmír (203 Czech Republic, guarantor); Jiří NOVÁK (203 Czech Republic); Günther BAUER (40 Austria); Václav HOLÝ (203 Czech Republic); Claudiu FALUB (642 Romania); Soichiro TSUJINO (392 Japan) and Detlev GRÜTZMACHER (276 Germany)

Edition

Materials Structure in Chemistry, Biology, Physics and Technology, Praha, 2007, 1211-5894

Other information

Language

English

Type of outcome

Article in a journal

Field of Study

10302 Condensed matter physics

Country of publisher

Czech Republic

Confidentiality degree

is not subject to a state or trade secret

RIV identification code

RIV/00216224:14310/07:00020385

Organization unit

Faculty of Science

Keywords in English

x-ray reflectivity; interdiffusion; SiGe

Tags

International impact
Changed: 31/1/2008 14:21, Mgr. Mojmír Meduňa, Ph.D.

Abstract

In the original language

We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 780-830 C by x-ray diffraction. From the fits of reflectivity and diffraction we have obtained diffusion coeficients and activation energy for Ge content 50%.

In Czech

Studovali jsme SiGe/Si multivrstvy žíhané in-situ při teplotách v rozsahu 780-830 C pomocí rtg difrakce. Z fitování reflexe a difrakce jsme obdrželi difúzní koeficienty a aktivační energie pro obsah Ge 50%.

Links

GP202/05/P286, research and development project
Name: Studium morfologie polovodičových multivrstev pomocí rtg rozptylu
Investor: Czech Science Foundation, Investigation of morphology of semiconductor multilayers using x-ray scattering
MSM0021622410, plan (intention)
Name: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical and chemical properties of advanced materials and structures