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@inproceedings{723189,
author = {Navrátil, Zdeněk and Brzobohatý, Oto and Trunec, David and Šmíd, Radek and Lazar, Lukáš and Schmidt, J and Šimek, J and Pekárek, S and Prukner, V},
address = {Praha},
booktitle = {Proceedings of ICPIG XXVIII},
edition = {1},
keywords = {neon RF discharge; optical emission spectroscopy; collisional-radiative model},
language = {eng},
location = {Praha},
isbn = {978-80-87026-01-4},
pages = {1618-1620},
publisher = {Institute of Plasma Physics AS CR},
title = {Determination of electron temperature in neon RF discharge by means of collisional-radiative model},
year = {2007}
}
TY - JOUR
ID - 723189
AU - Navrátil, Zdeněk - Brzobohatý, Oto - Trunec, David - Šmíd, Radek - Lazar, Lukáš - Schmidt, J - Šimek, J - Pekárek, S - Prukner, V
PY - 2007
TI - Determination of electron temperature in neon RF discharge by means of collisional-radiative model
PB - Institute of Plasma Physics AS CR
CY - Praha
SN - 9788087026014
KW - neon RF discharge
KW - optical emission spectroscopy
KW - collisional-radiative model
N2 - A collisional-radiative model was used to determine the electron temperature in capacitively coupled RF (13.56 MHz) discharge in neon. Two discharge regimes at different pressures were investigated. The temperature was determined from the fit of the theoretical spectra to the spectra measured by optical emission spectroscopy. Three kinds of electron distribution function - Maxwellian, Bi-Maxwellian and Pseudo-Bi-Maxwellian - were considered. The results were compared with Particle-in-Cell/ Monte-Carlo simulation. The comparison of the fitted calculated and measured spectra shows a good agreement between the theory and experiment. The electron temperature, which was estimated from the fits, was approx. 6 eV in the sheath at neon pressure of 10 Pa and approx. 2 eV in the bulk plasma at neon pressure of 80 Pa.
ER -
NAVRÁTIL, Zdeněk, Oto BRZOBOHATÝ, David TRUNEC, Radek ŠMÍD a Lukáš LAZAR. Determination of electron temperature in neon RF discharge by means of collisional-radiative model. In SCHMIDT, J, J ŠIMEK, S PEKÁREK a V PRUKNER. \textit{Proceedings of ICPIG XXVIII}. 1. vyd. Praha: Institute of Plasma Physics AS CR, 2007, s.~1618-1620. ISBN~978-80-87026-01-4.
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