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@inproceedings{747210, author = {Karásková, Monika and Zajíčková, Lenka and Jašek, Ondřej and Buršíková, Vilma and Franta, Daniel and Matějková, Jiřina and Klapetek, Petr}, address = {Brno}, booktitle = {Abstract Booklet of Inernational Conference NANO 07}, edition = {1}, keywords = {nanocrystalline diamond; plasma enhanced CVD; bias enhanced nucleation; hardness}, language = {eng}, location = {Brno}, isbn = {978-80-214-3460-8}, pages = {59-59}, publisher = {VUT Brno}, title = {Studying an Influence of a Nucleation Phase on Nanocrystalline Diamond Film Properties}, year = {2007} }
TY - JOUR ID - 747210 AU - Karásková, Monika - Zajíčková, Lenka - Jašek, Ondřej - Buršíková, Vilma - Franta, Daniel - Matějková, Jiřina - Klapetek, Petr PY - 2007 TI - Studying an Influence of a Nucleation Phase on Nanocrystalline Diamond Film Properties PB - VUT Brno CY - Brno SN - 9788021434608 KW - nanocrystalline diamond KW - plasma enhanced CVD KW - bias enhanced nucleation KW - hardness N2 - Nanocrystalline diamond (NCD) films were deposited by microwave (2.45 GHz) PECVD in the bell jar plasma reaktor of ASTeX type combined with the rf capacitive discharge providing a negative dc self-bias -125 V at the substrate holder. The applied mw power, pressure and substrate temperature were 850 W, 7.5 kPa and 1090 K, respectively. The continuous re-nucleation rate was performed by ions accelerated in dc electric field – bias enhanced nucleation (BEN) method. The nucleation phase turned to be very important for good mechanical properties of the films. The films with very good mechanical properties consisting of nanocrystalline diamond were prepared without substrate preheating under the deposition mixture of 9.4% of CH4 in H2. The films exhibited very low roughness (rms of heights 13 nm) and high hardness and elastic modulus, 70 and 375 GPa, respectively. The nucleation and film growth were studied by SEM, AFM and modelling of optical response of the substrate-interfacial layers-diamond film systems in UV/VIS/NIR range. ER -
KARÁSKOVÁ, Monika, Lenka ZAJÍČKOVÁ, Ondřej JAŠEK, Vilma BURŠÍKOVÁ, Daniel FRANTA, Jiřina MATĚJKOVÁ a Petr KLAPETEK. Studying an Influence of a Nucleation Phase on Nanocrystalline Diamond Film Properties. In \textit{Abstract Booklet of Inernational Conference NANO 07}. 1. vyd. Brno: VUT Brno, 2007, s.~59-59. ISBN~978-80-214-3460-8.
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