Mechanical properties of superhard TiB2 coatings prepared by DC
magnetron sputtering

J 2007

Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering

MIKULA, Marián, Branislav GRANČIČ, Vilma BURŠÍKOVÁ, Adrián CSUBA, Milan DRŽÍK et. al.

Základní údaje

Originální název

Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering

Název česky

Mechanické vlastnosti supertvrdých TiB2 povlaků připravených DC magnetronovým naprašováním

Autoři

MIKULA, Marián (703 Slovensko), Branislav GRANČIČ (703 Slovensko), Vilma BURŠÍKOVÁ (203 Česká republika, garant), Adrián CSUBA (703 Slovensko), Milan DRŽÍK (703 Slovensko), Štefan KAVECKÝ (703 Slovensko), Andrej PLECENIK (703 Slovensko) a Peter KÚŠ (703 Slovensko)

Vydání

Vacuum, USA, ELSEVIER (PERGAMON), 2007, 0042-207X

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10302 Condensed matter physics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Impakt faktor

Impact factor: 0.881

Kód RIV

RIV/00216224:14310/07:00023835

Organizační jednotka

Přírodovědecká fakulta

UT WoS

000250891600042

Klíčová slova anglicky

Magnetron sputtering; Superhard coatings; Mechanical properties; Residual stresses

Štítky

magnetron sputtering, mechanical properties, Residual stresses, Superhard coatings

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 7. 2. 2008 19:20, doc. RNDr. Vilma Buršíková, Ph.D.

Anotace

ORIG CZ

V originále

Superhard titanium diboride (TiB2) coatings (Hv> 40 GPa) were deposited in Ar atmosphere from stoichiometric TiB2 target using an unbalanced direct current (d. c.) magnetron. Polished Si (0 0 1), stainless steel, high speed steel (HSS) and tungsten carbide (WC) substrates were used for deposition. The influence of negative substrate bias, Us, and substrate temperature, Ts, on mechanical properties of TiB2 coatings was studied. X ray diffraction (XRD) analysis showed hexagonal TiB2 structure with (0 0 0 1) preferred orientation. The texture of TiB2 coatings was dependent upon the ion bombardment (Us increased from 0 to minus 300 V) and the substrate heating (Ts increased from room temperature (RT) to 700 C). All TiB2 coatings were measured using microhardness tester Fischerscope H100 equipped with Vickers and Berkovich diamond indenters and exhibited high values of hardness Hv up to 34 GPa, effective Young's modulus ranging from 450 to 600 GPa; here E and nu are the Young's modulus and Poisson's ratio, respectively, and elastic recovery We 80%. TiB2 coating with a maximum hardness Hv 73 GPa and E* 580 GPa was sputtered at Us=minus200 V and Ts=RT. Macrostresses of coatings sigma were measured by an optical wafer curvature technique and evaluated by Stoney equation. All TiB2 coatings exhibited compressive macrostresses.

Česky

Mechanické vlastnosti supertvrdých TiB2 povlaků připravených DC magnetronovým naprašováním

Návaznosti

MSM0021622411, záměr

Název: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Citovat

MIKULA, Marián, Branislav GRANČIČ, Vilma BURŠÍKOVÁ, Adrián CSUBA, Milan DRŽÍK, Štefan KAVECKÝ, Andrej PLECENIK a Peter KÚŠ. Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering. Vacuum. USA: ELSEVIER (PERGAMON), 2007, roč. 82, č. 2, s. 278-281. ISSN 0042-207X.

@article{755355,
   author = {Mikula, Marián and Grančič, Branislav and Buršíková, Vilma and Csuba, Adrián and Držík, Milan and Kavecký, Štefan and Plecenik, Andrej and Kúš, Peter},
   article_location = {USA},
   article_number = {2},
   keywords = {Magnetron sputtering; Superhard coatings; Mechanical properties; Residual stresses},
   language = {eng},
   issn = {0042-207X},
   journal = {Vacuum},
   title = {Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering},
   volume = {82},
   year = {2007}
}

TY  - JOUR
ID  - 755355
AU  - Mikula, Marián - Grančič, Branislav - Buršíková, Vilma - Csuba, Adrián - Držík, Milan - Kavecký, Štefan - Plecenik, Andrej - Kúš, Peter
PY  - 2007
TI  - Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering
JF  - Vacuum
VL  - 82
IS  - 2
SP  - 278-281
EP  - 278-281
PB  - ELSEVIER (PERGAMON)
SN  - 0042207X
KW  - Magnetron sputtering
KW  - Superhard coatings
KW  - Mechanical properties
KW  - Residual stresses
N2  - Superhard titanium diboride (TiB2) coatings (Hv> 40 GPa) were deposited in Ar atmosphere from stoichiometric TiB2 target using an unbalanced direct current (d. c.) magnetron. Polished Si (0 0 1), stainless steel, high speed steel (HSS) and tungsten carbide (WC) substrates were used for deposition. The influence of negative substrate bias, Us, and substrate temperature, Ts, on mechanical properties of TiB2 coatings was studied. X ray diffraction (XRD) analysis showed hexagonal TiB2 structure with (0 0 0 1) preferred orientation. The texture of TiB2 coatings was dependent upon the ion bombardment (Us increased from 0 to minus 300 V) and the substrate heating (Ts increased from room temperature (RT) to 700 C). All TiB2 coatings were measured using microhardness tester Fischerscope H100 equipped with Vickers and Berkovich diamond indenters and exhibited high values of hardness Hv up to 34 GPa, effective Young's modulus ranging from 450 to 600 GPa; here E and nu are the Young's modulus and Poisson's ratio, respectively, and elastic recovery We 80%. TiB2 coating with a maximum hardness Hv 73 GPa and E* 580 GPa was sputtered at Us=minus200 V and Ts=RT. Macrostresses of coatings sigma were measured by an optical wafer curvature technique and evaluated by Stoney equation. All TiB2 coatings exhibited compressive macrostresses.
ER  -

MIKULA, Marián, Branislav GRANČIČ, Vilma BURŠÍKOVÁ, Adrián CSUBA, Milan DRŽÍK, Štefan KAVECKÝ, Andrej PLECENIK a Peter KÚŠ. Mechanical properties of superhard TiB2 coatings prepared by DC magnetron sputtering. \textit{Vacuum}. USA: ELSEVIER (PERGAMON), 2007, roč.~82, č.~2, s.~278-281. ISSN~0042-207X.

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