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@inproceedings{774025,
author = {Vašina, Petr and Hytková, Tereza and Eliáš, Marek},
address = {Granada},
booktitle = {19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts},
keywords = {reactive magnetron sputering; target},
language = {eng},
location = {Granada},
isbn = {2-914771-04-5},
pages = {165-166},
publisher = {European Physical Society},
title = {Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process},
year = {2008}
}
TY - JOUR
ID - 774025
AU - Vašina, Petr - Hytková, Tereza - Eliáš, Marek
PY - 2008
TI - Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process
PB - European Physical Society
CY - Granada
SN - 2914771045
KW - reactive magnetron sputering
KW - target
N2 - Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process, proceeding, interdisciplinary study of plasma physics
ER -
VAŠINA, Petr, Tereza HYTKOVÁ a Marek ELIÁŠ. Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process. In \textit{19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts}. Granada: European Physical Society, 2008, s.~165-166. ISBN~2-914771-04-5.
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