2008
DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENEOUS DISCHARGE
TRUNEC, David, Martin ŠÍRA, Pavel SŤAHEL a Vilma BURŠÍKOVÁZákladní údaje
Originální název
DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENEOUS DISCHARGE
Název česky
Depozice tenkých vrstev v homogenním výboji za atmosférického tlaku
Autoři
Vydání
Francie, Proccedings of HAKONE X, od s. 1-5, 5 s. 2008
Nakladatel
University of Toulouse
Další údaje
Jazyk
angličtina
Typ výsledku
Stať ve sborníku
Obor
10305 Fluids and plasma physics
Stát vydavatele
Francie
Utajení
není předmětem státního či obchodního tajemství
Organizační jednotka
Přírodovědecká fakulta
Klíčová slova anglicky
electrical discharge; atmospheric pressure; nitrogen
Příznaky
Mezinárodní význam
Změněno: 19. 12. 2008 08:13, doc. Mgr. Pavel Sťahel, Ph.D.
V originále
The atmospheric pressure homogeneous discharge was used for the deposition of thin organosilicon polymer films. The discharge was burning in pure nitrogen used as a carrier gas and a small admixture of hexamethyldisiloxane which was used as a monomer. The temperature of the substrate was elevated up to 120 C to obtain harder thin films. The homogeneity of thin films was enhanced using movable upper electrode. Electrical measurements were used to distinguish between homogeneous and filamentary regime. Mechanical properties of deposited films were characterized by depth sensing indentation technique. The films were polymer-like, transparent in visible range, with uniform thickness and without pinholes.
Česky
The atmospheric pressure homogeneous discharge was used for the deposition of thin organosilicon polymer films. The discharge was burning in pure nitrogen used as a carrier gas and a small admixture of hexamethyldisiloxane which was used as a monomer. The temperature of the substrate was elevated up to 120 C to obtain harder thin films. The homogeneity of thin films was enhanced using movable upper electrode. Electrical measurements were used to distinguish between homogeneous and filamentary regime. Mechanical properties of deposited films were characterized by depth sensing indentation technique. The films were polymer-like, transparent in visible range, with uniform thickness and without pinholes.
Návaznosti
| GA202/06/1473, projekt VaV |
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