| VALTR, Miroslav, Petr KLAPETEK, Vilma BURŠÍKOVÁ, Ivan OHLÍDAL a Daniel FRANTA. Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge. Chem. listy. Praha: Česká společnost chemická, 2008, roč. 102, č. 16, s. 1529-1532. ISSN 0009-2770. |
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@article{798200,
author = {Valtr, Miroslav and Klapetek, Petr and Buršíková, Vilma and Ohlídal, Ivan and Franta, Daniel},
article_location = {Praha},
article_number = {16},
keywords = {plasma enhanced chemical vapor deposition;pulsed discharge;atomic force microscopy},
language = {eng},
issn = {0009-2770},
journal = {Chem. listy},
title = {Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge},
url = {http://www.chemicke-listy.cz/docs/full/2008_16_s1529-s1532.pdf},
volume = {102},
year = {2008}
}
TY - JOUR
ID - 798200
AU - Valtr, Miroslav - Klapetek, Petr - Buršíková, Vilma - Ohlídal, Ivan - Franta, Daniel
PY - 2008
TI - Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge
JF - Chem. listy
VL - 102
IS - 16
SP - 1529-1532
EP - 1529-1532
PB - Česká společnost chemická
SN - 00092770
KW - plasma enhanced chemical vapor deposition;pulsed discharge;atomic force microscopy
UR - http://www.chemicke-listy.cz/docs/full/2008_16_s1529-s1532.pdf
N2 - We studied in this work surface morphology of thin amorphous hydrocarbon films by means of atomic force microscope. The AFM data were collected in two regions on the sample. We observed a significant difference in roughness parameters between these regions with increasing total deposition time. RMS values of the heights near the edge of the sample did not exhibit any significant change with the total deposition time and in the mean are equal to approximately 7 nm. However, RMS values of the heights in the center of the sample increased linearly with the total deposition time and reached values up to 125.6 nm. The values of autocorrelation length were independent on total deposition time, but there was a difference in absolute values. The mean value of this parameter near the edge of the sample was 145 nm, while in the center of the sample the respective value was 359 nm. The suggested reason for this surface non-uniformity is the reactor design.
ER -
VALTR, Miroslav, Petr KLAPETEK, Vilma BURŠÍKOVÁ, Ivan OHLÍDAL a Daniel FRANTA. Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge. \textit{Chem. listy}. Praha: Česká společnost chemická, 2008, roč.~102, č.~16, s.~1529-1532. ISSN~0009-2770.
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