| FRANTA, Daniel, Ivan OHLÍDAL a David NEČAS. Optical quantities of rough films calculated by Rayleigh-Rice theory. physica status solidi (c). Weinheim: WILEY-VCH Verlag GmbH, 2008, roč. 5, č. 5, s. 1395–1398. ISSN 1610-1634. |
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@article{798388,
author = {Franta, Daniel and Ohlídal, Ivan and Nečas, David},
article_location = {Weinheim},
article_number = {5},
keywords = {thin-films; rough film; ellipsometry; spectrophotometry},
language = {eng},
issn = {1610-1634},
journal = {physica status solidi (c)},
title = {Optical quantities of rough films calculated by Rayleigh-Rice theory},
volume = {5},
year = {2008}
}
TY - JOUR
ID - 798388
AU - Franta, Daniel - Ohlídal, Ivan - Nečas, David
PY - 2008
TI - Optical quantities of rough films calculated by Rayleigh-Rice theory
JF - physica status solidi (c)
VL - 5
IS - 5
SP - 1395–1398
EP - 1395–1398
PB - WILEY-VCH Verlag GmbH
SN - 16101634
KW - thin-films
KW - rough film
KW - ellipsometry
KW - spectrophotometry
N2 - Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.
ER -
FRANTA, Daniel, Ivan OHLÍDAL a David NEČAS. Optical quantities of rough films calculated by Rayleigh-Rice theory. \textit{physica status solidi (c)}. Weinheim: WILEY-VCH Verlag GmbH, 2008, roč.~5, č.~5, s.~1395–1398. ISSN~1610-1634.
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