2008
Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies
OHLÍDAL, Ivan, David NEČAS a Daniel FRANTAZákladní údaje
Originální název
Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies
Název česky
Spektroskopická elipsometrie a odrazivost statisticky drsných povrchů vykazující široký interval prostorových frekvencí
Autoři
OHLÍDAL, Ivan (203 Česká republika, garant), David NEČAS (203 Česká republika) a Daniel FRANTA (203 Česká republika)
Vydání
physica status solidi (c), Weinheim, WILEY-VCH Verlag GmbH, 2008, 1610-1634
Další údaje
Jazyk
angličtina
Typ výsledku
Článek v odborném periodiku
Obor
10306 Optics
Stát vydavatele
Německo
Utajení
není předmětem státního či obchodního tajemství
Kód RIV
RIV/00216224:14310/08:00025069
Organizační jednotka
Přírodovědecká fakulta
UT WoS
000256862500096
Klíčová slova anglicky
ellipsometry; spectrophotometry; rough surfaces
Štítky
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 3. 7. 2009 09:40, Mgr. Daniel Franta, Ph.D.
V originále
Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy.
Česky
Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy.
Návaznosti
| GA203/05/0524, projekt VaV |
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| MSM0021622411, záměr |
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