OHLÍDAL, Ivan, David NEČAS a Daniel FRANTA. Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies. physica status solidi (c). Weinheim: WILEY-VCH Verlag GmbH, 2008, roč. 5, č. 5, s. 1399–1402. ISSN 1610-1634. |
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@article{798460, author = {Ohlídal, Ivan and Nečas, David and Franta, Daniel}, article_location = {Weinheim}, article_number = {5}, keywords = {ellipsometry; spectrophotometry; rough surfaces}, language = {eng}, issn = {1610-1634}, journal = {physica status solidi (c)}, title = {Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies}, volume = {5}, year = {2008} }
TY - JOUR ID - 798460 AU - Ohlídal, Ivan - Nečas, David - Franta, Daniel PY - 2008 TI - Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies JF - physica status solidi (c) VL - 5 IS - 5 SP - 1399–1402 EP - 1399–1402 PB - WILEY-VCH Verlag GmbH SN - 16101634 KW - ellipsometry KW - spectrophotometry KW - rough surfaces N2 - Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy. ER -
OHLÍDAL, Ivan, David NEČAS a Daniel FRANTA. Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies. \textit{physica status solidi (c)}. Weinheim: WILEY-VCH Verlag GmbH, 2008, roč.~5, č.~5, s.~1399–1402. ISSN~1610-1634.
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