| STUDNIČKA, Filip, David TRUNEC, Pavel SŤAHEL, Vilma BURŠÍKOVÁ a Lukáš KELAR. DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE. Chemické Listy, II Central European Symposium on Plasma Chemistry 2008. 2008, roč. 1, č. 16, s. 1519-1523. ISSN 1803-2389. |
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@article{800033,
author = {Studnička, Filip and Trunec, David and Sťahel, Pavel and Buršíková, Vilma and Kelar, Lukáš},
article_number = {16},
keywords = {plasma deposition},
language = {eng},
issn = {1803-2389},
journal = {Chemické Listy, II Central European Symposium on Plasma Chemistry 2008},
title = {DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE},
volume = {1},
year = {2008}
}
TY - JOUR
ID - 800033
AU - Studnička, Filip - Trunec, David - Sťahel, Pavel - Buršíková, Vilma - Kelar, Lukáš
PY - 2008
TI - DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE
JF - Chemické Listy, II Central European Symposium on Plasma Chemistry 2008
VL - 1
IS - 16
SP - 1519-1523
EP - 1519-1523
SN - 18032389
KW - plasma deposition
N2 - The aim of the work was to study the deposition of thin films in ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 atmosphere. The mechanical properties of films were studied by indentation techniques. The films exhibited hardnes in the range from 0.5 to 7 GPa depending on the deposition conditions.
ER -
STUDNIČKA, Filip, David TRUNEC, Pavel SŤAHEL, Vilma BURŠÍKOVÁ a Lukáš KELAR. DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE. \textit{Chemické Listy, II Central European Symposium on Plasma Chemistry 2008}. 2008, roč.~1, č.~16, s.~1519-1523. ISSN~1803-2389.
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