STUDNIČKA, Filip, David TRUNEC, Pavel SŤAHEL, Vilma BURŠÍKOVÁ a Lukáš KELAR. DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE. Chemické Listy, II Central European Symposium on Plasma Chemistry 2008. 2008, roč. 1, č. 16, s. 1519-1523. ISSN 1803-2389. |
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@article{800033, author = {Studnička, Filip and Trunec, David and Sťahel, Pavel and Buršíková, Vilma and Kelar, Lukáš}, article_number = {16}, keywords = {plasma deposition}, language = {eng}, issn = {1803-2389}, journal = {Chemické Listy, II Central European Symposium on Plasma Chemistry 2008}, title = {DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE}, volume = {1}, year = {2008} }
TY - JOUR ID - 800033 AU - Studnička, Filip - Trunec, David - Sťahel, Pavel - Buršíková, Vilma - Kelar, Lukáš PY - 2008 TI - DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE JF - Chemické Listy, II Central European Symposium on Plasma Chemistry 2008 VL - 1 IS - 16 SP - 1519-1523 EP - 1519-1523 SN - 18032389 KW - plasma deposition N2 - The aim of the work was to study the deposition of thin films in ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 atmosphere. The mechanical properties of films were studied by indentation techniques. The films exhibited hardnes in the range from 0.5 to 7 GPa depending on the deposition conditions. ER -
STUDNIČKA, Filip, David TRUNEC, Pavel SŤAHEL, Vilma BURŠÍKOVÁ a Lukáš KELAR. DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE HOMOGENOUS DISCHARGE IN N2 + HMDSO + O2 ATMOSPHEREIN N2 + HMDSO + O2 ATMOSPHERE. \textit{Chemické Listy, II Central European Symposium on Plasma Chemistry 2008}. 2008, roč.~1, č.~16, s.~1519-1523. ISSN~1803-2389.
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