VAŠINA, Petr, Marcel MEŠKO, Ludovic DE POUCQUES, Jean BRETAGNE, Caroline BOISSE-LAPORTE a Michel TOUZEAU. Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2008, roč. 17, č. 3, s. Article number 03507, 9 s. ISSN 0963-0252. |
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@article{800643, author = {Vašina, Petr and Meško, Marcel and de Poucques, Ludovic and Bretagne, Jean and BoisseandLaporte, Caroline and Touzeau, Michel}, article_location = {Bristol}, article_number = {3}, keywords = {high power pulses; magnetron}, language = {eng}, issn = {0963-0252}, journal = {Plasma Sources Science and Technology}, title = {Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport}, volume = {17}, year = {2008} }
TY - JOUR ID - 800643 AU - Vašina, Petr - Meško, Marcel - de Poucques, Ludovic - Bretagne, Jean - Boisse-Laporte, Caroline - Touzeau, Michel PY - 2008 TI - Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport JF - Plasma Sources Science and Technology VL - 17 IS - 3 SP - Article number 03507 EP - Article number 03507 PB - Institute of Physics Publishing SN - 09630252 KW - high power pulses KW - magnetron N2 - Papers study by means of time and space resolved measurement of substrate holder current the transport of ionized sputtered particlef from the magnetron cathode towards the substrate. ER -
VAŠINA, Petr, Marcel MEŠKO, Ludovic DE POUCQUES, Jean BRETAGNE, Caroline BOISSE-LAPORTE a Michel TOUZEAU. Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport. \textit{Plasma Sources Science and Technology}. Bristol: Institute of Physics Publishing, 2008, roč.~17, č.~3, s.~Article number 03507, 9 s. ISSN~0963-0252.
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