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@book{806840,
author = {Karásková, Monika and Zajíčková, Lenka and Jašek, Ondřej and Buršíková, Vilma and Franta, Daniel and Matějková, Jiřina and Klapetek, Petr},
address = {Košice, Sloveská republika},
keywords = {nanocrystalline diamond, plasma enhanced CVD, bias enhanced nucleation, hardness},
language = {eng},
location = {Košice, Sloveská republika},
publisher = {Hutnicka fakulta - Technická univerzita v Košiciach},
title = {Studying an influence of a nucleation phase on nanocrystalline diamond film properties},
year = {2007}
}
TY - BOOK
ID - 806840
AU - Karásková, Monika - Zajíčková, Lenka - Jašek, Ondřej - Buršíková, Vilma - Franta, Daniel - Matějková, Jiřina - Klapetek, Petr
PY - 2007
TI - Studying an influence of a nucleation phase on nanocrystalline diamond film properties
VL - 6
PB - Hutnicka fakulta - Technická univerzita v Košiciach
CY - Košice, Sloveská republika
KW - nanocrystalline diamond, plasma enhanced CVD, bias enhanced nucleation, hardness
N2 - Nanocrystalline diamond (NCD) films were deposited by microwave (2.45 GHz) PECVD in the bell jar plasma reaktor of ASTeX type combined with the rf capacitive discharge providing a negative dc self-bias -125 V at the substrate holder. The applied mw power, pressure and substrate temperature were 850 W, 7.5 kPa and 1090 K, respectively. The continuous re-nucleation rate was performed by ions accelerated in dc electric field – bias enhanced nucleation (BEN) method. The nucleation phase turned to be very important for good mechanical properties of the films. The films with very good mechanical properties consisting of nanocrystalline diamond were prepared without substrate preheating under the deposition mixture of 9.4% of CH4 in H2. The films exhibited very low roughness (rms of heights 13 nm) and high hardness and elastic modulus, 70 and 375 GPa, respectively. The nucleation and film growth were studied by SEM, AFM and modelling of optical response of the substrate-interfacial layers-diamond film systems in UV/VIS/NIR range.
ER -
KARÁSKOVÁ, Monika, Lenka ZAJÍČKOVÁ, Ondřej JAŠEK, Vilma BURŠÍKOVÁ, Daniel FRANTA, Jiřina MATĚJKOVÁ a Petr KLAPETEK. \textit{Studying an influence of a nucleation phase on nanocrystalline diamond film properties}. Košice, Sloveská republika: Hutnicka fakulta - Technická univerzita v Košiciach, 2007, 321 s. 6. ISSN~1335-1532.
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