Investigation of Neon RF Discharge by Means of Refined
Collisional-Radiative model

D 2008

Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

NAVRÁTIL, Zdeněk, Jana JURMANOVÁ, Pavel DVOŘÁK a David TRUNEC

Základní údaje

Originální název

Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

Název česky

Studium RF výboje v neonu pomocí srážkově-radiačního modelu

Autoři

NAVRÁTIL, Zdeněk (203 Česká republika, garant), Jana JURMANOVÁ (203 Česká republika), Pavel DVOŘÁK (703 Slovensko) a David TRUNEC (203 Česká republika)

Vydání

Praha, Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008, od s. 108-109, 1 s. 2008

Nakladatel

ČVUT v Praze, Organizační výbor sympozia

Další údaje

Jazyk

angličtina

Typ výsledku

Stať ve sborníku

Obor

10305 Fluids and plasma physics

Stát vydavatele

Česká republika

Utajení

není předmětem státního či obchodního tajemství

Kód RIV

RIV/00216224:14310/08:00025162

Organizační jednotka

Přírodovědecká fakulta

ISBN

978-80-01-04030-0

Klíčová slova anglicky

rf discharge; collisional-radiative model; optical emission spectroscopy; neon

Štítky

collisional-radiative model, neon, optical emission spectroscopy, RF discharge

Příznaky

Mezinárodní význam

Změněno: 8. 1. 2009 14:05, doc. Mgr. Zdeněk Navrátil, Ph.D.

Anotace

ORIG CZ

V originále

A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. Moreover, the model was modified in order to determine the emission coefficient of unit plasma volume in absolute values. Since in previous work the measurement of relative intensities was found to be insufficient for determination of electron density, an absolute intensity measurement was performed. Jobin Yvon Horiba Triax 550 spectrometer, equipped with CCD camera, was calibrated by Oriel Tungsten-halogen filament lamp. The radiation of a defined narrow cylindrical region was taken out by means of two iris diaphragms, mounted at their common axis in front of the optical fibre. The temporal development of the plasma, important for the determination of real radiation time, was studied by Jobin Yvon Horiba FHR 1000 spectrometer with ICCD camera. The sensitivity of the model, as well as the influence of the newly incorporated processes on the results was evaluated. Assuming Maxwellian electron distribution function, without absolute intensity calibration the model is insensitive for electron temperatures below 4 eV.

Česky

Dříve vyvinutý srážkově-radiační model byl použit ke studiu kapacitně vázaného RF výboje (13,56 MHz) v neonu. Spolu s absolutním měření intenzity záření bylo možné stanovit teplotu a koncentraci elektronů.

Návaznosti

GA202/06/0776, projekt VaV

Název: Pokročilý výzkum a vývoj zdrojů nízkoteplotního plazmatu

Investor: Grantová agentura ČR, Pokročilý výzkum a vývoj zdrojů nízkoteplotního plazmatu

MSM0021622411, záměr

Název: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Citovat

NAVRÁTIL, Zdeněk, Jana JURMANOVÁ, Pavel DVOŘÁK a David TRUNEC. Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model. In Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008. Praha: ČVUT v Praze, Organizační výbor sympozia, 2008, s. 108-109, 1 s. ISBN 978-80-01-04030-0.

@inproceedings{807110,
   author = {Navrátil, Zdeněk and Jurmanová, Jana and Dvořák, Pavel and Trunec, David},
   address = {Praha},
   booktitle = {Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008},
   keywords = {rf discharge; collisional-radiative model; optical emission spectroscopy; neon},
   language = {eng},
   location = {Praha},
   isbn = {978-80-01-04030-0},
   pages = {108-109},
   publisher = {ČVUT v Praze, Organizační výbor sympozia},
   title = {Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model},
   year = {2008}
}

TY  - JOUR
ID  - 807110
AU  - Navrátil, Zdeněk - Jurmanová, Jana - Dvořák, Pavel - Trunec, David
PY  - 2008
TI  - Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model
PB  - ČVUT v Praze, Organizační výbor sympozia
CY  - Praha
SN  - 9788001040300
KW  - rf discharge
KW  - collisional-radiative model
KW  - optical emission spectroscopy
KW  - neon
N2  - A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. Moreover, the model was modified in order to determine the emission coefficient of unit plasma volume in absolute values. Since in previous work the measurement of relative intensities was found to be insufficient for determination of electron density, an absolute intensity measurement was performed. Jobin Yvon Horiba Triax 550 spectrometer, equipped with CCD camera, was calibrated by Oriel Tungsten-halogen filament lamp. The radiation of a defined narrow cylindrical region was taken out by means of two iris diaphragms, mounted at their common axis in front of the optical fibre. The temporal development of the plasma, important for the determination of real radiation time, was studied by Jobin Yvon Horiba FHR 1000 spectrometer with ICCD camera. The sensitivity of the model, as well as the influence of the newly incorporated processes on the results was evaluated. Assuming Maxwellian electron distribution function, without absolute intensity calibration the model is insensitive for electron temperatures below 4 eV.
ER  -

NAVRÁTIL, Zdeněk, Jana JURMANOVÁ, Pavel DVOŘÁK a David TRUNEC. Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model. In \textit{Programme \&{} Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008}. Praha: ČVUT v Praze, Organizační výbor sympozia, 2008, s.~108-109, 1 s. ISBN~978-80-01-04030-0.

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