2008
Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges
BURSIKOVA, Vilma, Vratislav PERINA, Jaroslav SOBOTA, Jan GROSSMAN, Petr KLAPETEK et. al.Základní údaje
Originální název
Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges
Název česky
Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges
Autoři
BURSIKOVA, Vilma, Vratislav PERINA, Jaroslav SOBOTA, Jan GROSSMAN, Petr KLAPETEK, Jiri BURSIK, Daniel FRANTA, Ivan OHLIDAL, Lenka ZAJICKOVA, Josef HAVEL a Jan JANCA
Vydání
2nd conference on New Diamond and Nano Carbons 2008, 2008
Další údaje
Jazyk
angličtina
Typ výsledku
Konferenční abstrakt
Obor
10305 Fluids and plasma physics
Stát vydavatele
Tchaj-wan
Utajení
není předmětem státního či obchodního tajemství
Organizační jednotka
Přírodovědecká fakulta
Klíčová slova anglicky
Characterization; nanostructured diamond-like carbon coatings; single; dual frequency capacitive discharge
Štítky
Příznaky
Mezinárodní význam
Změněno: 13. 1. 2009 15:26, Mgr. Adrian Stoica, Ph.D.
V originále
Nanostructured diamond-like carbon coatings with various doping (Si, O, N) were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges. The aim of the present work was to compare the properties of NDLC films prepared in single and dual-frequency capacitive plasmas (DFCCP). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.
Česky
Nanostructured diamond-like carbon coatings with various doping (Si, O, N) were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges. The aim of the present work was to compare the properties of NDLC films prepared in single and dual-frequency capacitive plasmas (DFCCP). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.
Návaznosti
| GA202/07/1669, projekt VaV |
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| MSM0021622411, záměr |
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