a 2008

Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges

BURSIKOVA, Vilma, Vratislav PERINA, Jaroslav SOBOTA, Jan GROSSMAN, Petr KLAPETEK et. al.

Basic information

Original name

Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges

Name in Czech

Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges

Authors

BURSIKOVA, Vilma, Vratislav PERINA, Jaroslav SOBOTA, Jan GROSSMAN, Petr KLAPETEK, Jiri BURSIK, Daniel FRANTA, Ivan OHLIDAL, Lenka ZAJICKOVA, Josef HAVEL and Jan JANCA

Edition

2nd conference on New Diamond and Nano Carbons 2008, 2008

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

Taiwan

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

Keywords in English

Characterization; nanostructured diamond-like carbon coatings; single; dual frequency capacitive discharge

Tags

Tags

International impact
Změněno: 13/1/2009 15:26, Mgr. Adrian Stoica, Ph.D.

Abstract

ORIG CZ

V originále

Nanostructured diamond-like carbon coatings with various doping (Si, O, N) were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges. The aim of the present work was to compare the properties of NDLC films prepared in single and dual-frequency capacitive plasmas (DFCCP). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.

In Czech

Nanostructured diamond-like carbon coatings with various doping (Si, O, N) were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges. The aim of the present work was to compare the properties of NDLC films prepared in single and dual-frequency capacitive plasmas (DFCCP). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.

Links

GA202/07/1669, research and development project
Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích
Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface