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@inproceedings{821296,
author = {Vašina, Petr and Dvořák, Pavel},
address = {Bratislava},
booktitle = {Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes},
keywords = {reactive sputtering},
language = {eng},
location = {Bratislava},
isbn = {978-80-89186-45-7},
pages = {253-253},
publisher = {Comenius University in Bratislava},
title = {Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process},
year = {2009}
}
TY - JOUR
ID - 821296
AU - Vašina, Petr - Dvořák, Pavel
PY - 2009
TI - Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process
PB - Comenius University in Bratislava
CY - Bratislava
SN - 9788089186457
KW - reactive sputtering
N2 - Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process, proceeding
ER -
VAŠINA, Petr a Pavel DVOŘÁK. Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process. In \textit{Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes}. Bratislava: Comenius University in Bratislava, 2009, s.~253. ISBN~978-80-89186-45-7.
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