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@inproceedings{821296, author = {Vašina, Petr and Dvořák, Pavel}, address = {Bratislava}, booktitle = {Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes}, keywords = {reactive sputtering}, language = {eng}, location = {Bratislava}, isbn = {978-80-89186-45-7}, pages = {253-253}, publisher = {Comenius University in Bratislava}, title = {Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process}, year = {2009} }
TY - JOUR ID - 821296 AU - Vašina, Petr - Dvořák, Pavel PY - 2009 TI - Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process PB - Comenius University in Bratislava CY - Bratislava SN - 9788089186457 KW - reactive sputtering N2 - Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process, proceeding ER -
VAŠINA, Petr a Pavel DVOŘÁK. Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process. In \textit{Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes}. Bratislava: Comenius University in Bratislava, 2009, s.~253. ISBN~978-80-89186-45-7.
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