| NEČAS, David, Ivan OHLÍDAL a Daniel FRANTA. Reflectance of non-uniform thin films. Journal of Optics A: Pure and Applied Optics. Bristol, GB: IOP Publishing Ltd, 2009, roč. 11, č. 4, s. 1-9. ISSN 1464-4258. |
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@article{824022,
author = {Nečas, David and Ohlídal, Ivan and Franta, Daniel},
article_location = {Bristol, GB},
article_number = {4},
keywords = {thin films; thickness non-uniformity; spectrophotometry},
language = {eng},
issn = {1464-4258},
journal = {Journal of Optics A: Pure and Applied Optics},
title = {Reflectance of non-uniform thin films},
volume = {11},
year = {2009}
}
TY - JOUR
ID - 824022
AU - Nečas, David - Ohlídal, Ivan - Franta, Daniel
PY - 2009
TI - Reflectance of non-uniform thin films
JF - Journal of Optics A: Pure and Applied Optics
VL - 11
IS - 4
SP - 1-9
EP - 1-9
PB - IOP Publishing Ltd
SN - 14644258
KW - thin films
KW - thickness non-uniformity
KW - spectrophotometry
N2 - A general formula for the reflectance of a thin film with non-uniform thickness is derived based on expressing its thickness distribution density. Examples of such thickness distribution densities, corresponding to various shapes of the thickness non-uniformity, are presented. In addition, a reflectance formula is derived as the second-order approximation of the general formula expanded into a power series in the root mean square (rms) value of the thickness distribution. By means of a numerical analysis, it is shown that for greater non-uniformities it is necessary to take into account their concrete shapes in the optical characterization, whereas for small non-uniformities the concrete shape is of no importance for the characterization. The theoretical results are applied to the complete optical characterization of a selected non-uniform carbon nitride film.
ER -
NEČAS, David, Ivan OHLÍDAL a Daniel FRANTA. Reflectance of non-uniform thin films. \textit{Journal of Optics A: Pure and Applied Optics}. Bristol, GB: IOP Publishing Ltd, 2009, roč.~11, č.~4, s.~1-9. ISSN~1464-4258.
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