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@inproceedings{838252,
author = {Schmidtová, Tereza and Vašina, Petr},
address = {Brno},
booktitle = {Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8},
keywords = {modelling; magnetron},
language = {eng},
location = {Brno},
isbn = {978-80-214-3875-0},
pages = {75-75},
publisher = {Brno University of Technology},
title = {Modelling of surface processes taking place during reactive magnetron sputtering deposition process with simultaneous adding of hydrogen and oxygen},
year = {2009}
}
TY - JOUR
ID - 838252
AU - Schmidtová, Tereza - Vašina, Petr
PY - 2009
TI - Modelling of surface processes taking place during reactive magnetron sputtering deposition process with simultaneous adding of hydrogen and oxygen
PB - Brno University of Technology
CY - Brno
SN - 9788021438750
KW - modelling
KW - magnetron
N2 - Modelling of surface processes taking place during reactive magnetron sputtering deposition process with simultaneous adding of hydrogen and oxygen, procceding
ER -
SCHMIDTOVÁ, Tereza a Petr VAŠINA. Modelling of surface processes taking place during reactive magnetron sputtering deposition process with simultaneous adding of hydrogen and oxygen. In \textit{Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8}. Brno: Brno University of Technology, 2009, s.~75-75. ISBN~978-80-214-3875-0.
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