2008
Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
ZAJÍČKOVÁ, Lenka; Zuzana KUČEROVÁ; Vilma BURŠÍKOVÁ; Daniel FRANTA; Vratislav PEŘINA et. al.Základní údaje
Originální název
Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
Název česky
Složení a funkční vlastnosti organosilikonových polymerů vytvářených z hexamethyldisiloxanu a octamethylcyclotetrasiloxanu
Autoři
Vydání
WARRENDALE, ORGANIC/INORGANIC HYBRID MATERIALS - 2007, od s. 159-164, 6 s. 2008
Nakladatel
MATERIALS RESEARCH SOCIETY
Další údaje
Jazyk
angličtina
Typ výsledku
Stať ve sborníku
Obor
10305 Fluids and plasma physics
Stát vydavatele
Velká Británie a Severní Irsko
Utajení
není předmětem státního či obchodního tajemství
Organizační jednotka
Přírodovědecká fakulta
ISBN
978-1-55899-967-1
ISSN
UT WoS
000256796400019
Klíčová slova anglicky
THIN-FILMS; HYBRID; DEPOSITION; SILICA; MODEL
Štítky
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 27. 3. 2013 09:19, doc. Mgr. Lenka Zajíčková, Ph.D.
V originále
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
Česky
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
Návaznosti
| MSM0021622411, záměr |
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| 1K05025, projekt VaV |
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