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@proceedings{841473,
author = {Dvořák, Pavel},
booktitle = {ICPIG 2009 - Conference proceedings},
keywords = {plasma potential; higher harmonic frequencies; capacitively coupled discharge; plasma},
language = {eng},
title = {Measurement of plasma potential waveform in capacitive discharge},
year = {2009}
}
TY - CONF
ID - 841473
AU - Dvořák, Pavel
PY - 2009
TI - Measurement of plasma potential waveform in capacitive discharge
KW - plasma potential
KW - higher harmonic frequencies
KW - capacitively coupled discharge
KW - plasma
N2 - The uncompensated probe was used for measurement of plasma potential waveforms. A method is presented that enables calculation of probe sheath voltage and, consequently, enables to get the plasma potential waveform by means of probe measurements. The method was successfully tested in nitrogen plasma. In order to get reliable results the method requires knowledge of plasma parameters which can be measured by a compensated Langmuir probe. It was shown that the waveforms of plasma potential and probe voltage differ significantly. Therefore, the influence of the probe sheath voltage whose calculation is presented can not be neglected by measurement of the plasma potential. At low pressure, the plasma potential waveform contained high amount of higher harmonic frequencies that were ignited namely during the fast expansion of the sheath at the powered electrode.
ER -
DVOŘÁK, Pavel. Measurement of plasma potential waveform in capacitive discharge. In \textit{ICPIG 2009 - Conference proceedings}. 2009.
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