Optical analysis by means of spectroscopic reflectometry of
single and double layers with correlated randomly rough
boundaries

J 1995

Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries

OHLÍDAL, Ivan, František VIŽĎA a Miloslav OHLÍDAL

Základní údaje

Originální název

Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries

Název česky

Optická analýza pomocí spektroskopické reflektometrie jenoduchých a dvojitých vrstev s korelovanými náhodnými rozhraními

Autoři

OHLÍDAL, Ivan, František VIŽĎA a Miloslav OHLÍDAL

Vydání

Optical Engineering, 1995, 0091-3286

Další údaje

Jazyk

angličtina

Typ výsledku

Článek v odborném periodiku

Obor

10306 Optics

Stát vydavatele

Velká Británie a Severní Irsko

Utajení

není předmětem státního či obchodního tajemství

Organizační jednotka

Přírodovědecká fakulta

Klíčová slova česky

odrazivost jenoduchých a dvojitých vrstev; drsnost rozhraní vrstev; korelace rozhraní

Klíčová slova anglicky

reflectance of single and double layers; roughness of boundaries of layers; correlation of boundaries

Příznaky

Mezinárodní význam, Recenzováno

Změněno: 27. 1. 2013 11:39, Mgr. David Nečas, Ph.D.

Anotace

V originále

Optical analysis of rough single and double layers is performed by interpreting the spectral dependences of the measured coherent reflectance. Formulas for the coherent reflectance of these systems derived within the scalar theory of diffraction of light are used for this interpretation. Possibilities and limitations of the method utilized are illustrated using several concrete samples of both the rough single and double layers represented by models corresponding to fully correlated (identical), partially correlated, and fully uncorrelated boundaries. It is shown that the values of the optical parameters, the root-mean-square (rms) values of the heights of the boundary irregularities and the values of the cross-correlation coefficients of the boundaries characterizing the layered systems mentioned can be determined within the method described.

Návaznosti

GA101/94/0555, projekt VaV

Název: Měření povrchové drsnosti z úhlové korelace polí koherenční zrnitosti

Investor: Grantová agentura ČR, Měření povrchové drsnosti z úhlové korelace polí koherenční zrnitosti

Citovat

OHLÍDAL, Ivan, František VIŽĎA a Miloslav OHLÍDAL. Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries. Optical Engineering. 1995, roč. 34, č. 6, s. 1761-1768. ISSN 0091-3286.

@article{849999,
   author = {Ohlídal, Ivan and Vižďa, František and Ohlídal, Miloslav},
   article_number = {6},
   keywords = {reflectance of single and double layers; roughness of boundaries of layers; correlation of boundaries},
   language = {eng},
   issn = {0091-3286},
   journal = {Optical Engineering},
   title = {Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries},
   volume = {34},
   year = {1995}
}

TY  - JOUR
ID  - 849999
AU  - Ohlídal, Ivan - Vižďa, František - Ohlídal, Miloslav
PY  - 1995
TI  - Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries
JF  - Optical Engineering
VL  - 34
IS  - 6
SP  - 1761-1768
EP  - 1761-1768
SN  - 00913286
KW  - reflectance of single and double layers
KW  - roughness of boundaries of layers
KW  - correlation of boundaries
N2  - Optical analysis of rough single and double layers is performed by interpreting the spectral dependences of the measured coherent reflectance. Formulas for the coherent reflectance of these systems derived within the scalar theory of diffraction of light are used for this interpretation. Possibilities and limitations of the method utilized are illustrated using several concrete samples of both the rough single and double layers represented by models corresponding to fully correlated (identical), partially correlated, and fully uncorrelated boundaries. It is shown that the values of the optical parameters, the root-mean-square (rms) values of the heights of the boundary irregularities and the values of the cross-correlation coefficients of the boundaries characterizing the layered systems mentioned can be determined within the method described.
ER  -

OHLÍDAL, Ivan, František VIŽĎA a Miloslav OHLÍDAL. Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries. \textit{Optical Engineering}. 1995, roč.~34, č.~6, s.~1761-1768. ISSN~0091-3286.

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