Determination of plasma parameters in neon RF discharge by optical emission spectroscopy
| NAVRÁTIL, Zdeněk and David TRUNEC. Determination of plasma parameters in neon RF discharge by optical emission spectroscopy. In Proceedings of XXIX ICPIG. 2009. |
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| Basic information | |
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| Original name | Determination of plasma parameters in neon RF discharge by optical emission spectroscopy |
| Name in Czech | Stanovení parametrů plazmatu RF výboje v neonu pomocí optické emisní spektroskopie |
| Authors | NAVRÁTIL, Zdeněk (203 Czech Republic, guarantor, belonging to the institution) and David TRUNEC (203 Czech Republic, belonging to the institution). |
| Edition | Proceedings of XXIX ICPIG, 2009. |
| Other information | |
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| Original language | English |
| Type of outcome | Conference abstract |
| Field of Study | 10305 Fluids and plasma physics |
| Country of publisher | Mexico |
| Confidentiality degree | is not subject to a state or trade secret |
| RIV identification code | RIV/00216224:14310/09:00049386 |
| Organization unit | Faculty of Science |
| Keywords (in Czech) | neon; RF výboj; koncentrace elektronů; srážkově-radiační model; optická spektroskopie |
| Keywords in English | neon; RF discharge; electron density; c-r model; optical spectroscopy |
| Tags | IK, rivok |
| Tags | International impact |
| Changed by | Changed by: doc. Mgr. Zdeněk Navrátil, Ph.D., učo 3323. Changed: 12/4/2012 17:20. |
| Abstract |
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| Electron density and electron temperature was determined in RF (13.56 MHz) discharge in neon. Collisional-radiative model was applied to determine the theoretical spectra of the discharge for specific plasma parameters. These parameters could be then determined from the best fit of the measured and theoretical spectra. Absolute intensity measurement of plasma emission coefficients of 26 neon lines provided the determination of electron density, their relative intensities determined the electron temperature. Both electron temperature and density were measured as a function of RF power. It was found, that with increasing power the electron density increases, but electron temperature decreases. |
| Abstract (in Czech) |
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| V RF výboji v neonu byla měřena koncentrace elektronů a elektronová teplota. Studium bylo zaměřeno na oblast výboje v blízkosti elektrody. Parametry byly studovány v závislosti na elektrickém výkonu dodávaném do výboje. |
| Links | |
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| GA202/09/0800, research and development project | Name: Výzkum a použití impulsních a mikrovlnných zdrojů plazmatu |
| Investor: Czech Science Foundation | |
| KAN101630651, research and development project | Name: Tvorba nano-vrstev a nano-povlaků na textiliích s využitím plazmových povrchových úprav za atmosférického tlaku |
| Investor: Academy of Sciences of the Czech Republic, Preparation of nano-films and nano-coatings on textiles using plasma surface treatment at atmospheric pressure | |
| MSM0021622411, plan (intention) | Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek |
| Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface | |
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